Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope
文献类型：会议论文
| 作者 | Gao, Mingxing1,2; Jing, Hongwei1; Cao, Xuedong1; Chen, Lin1,2; Yang, Jie1 |
| 出版日期 | 2015 |
| 会议名称 | Proceedings of SPIE - The International Society for Optical Engineering |
| 会议日期 | 2015 |
| 卷号 | 9623 |
| 页码 | 96229N |
| 中文摘要 | When using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized. © 2015 SPIE. |
| 英文摘要 | When using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized. © 2015 SPIE. |
| 收录类别 | SCI ; EI |
| 学科主题 | Microscopes - Mirrors - Optical instruments - Probes |
| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7908]  |
| 专题 | 光电技术研究所_质量处（质检中心） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, P.O .Box 350, Chengdu, China 2.University of Chinese Academy of Sciences, Beijing, China |
| 推荐引用方式 GB/T 7714 | Gao, Mingxing,Jing, Hongwei,Cao, Xuedong,et al. Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. 2015. |
入库方式： OAI收割
来源：光电技术研究所
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