Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor
文献类型：会议论文
| 作者 | Chen, Lin1,2; Jing, Hongwei1; Wei, Zhongwei1,2; Cao, Xuedong1 |
| 出版日期 | 2015 |
| 会议名称 | Proceedings of SPIE: 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 |
| 会议日期 | 2015 |
| 卷号 | 9446 |
| 页码 | 944621 |
| 通讯作者 | Chen, Lin |
| 中文摘要 | A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology. ©2015 SPIE. |
| 英文摘要 | A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology. ©2015 SPIE. |
| 收录类别 | SCI ; EI |
| 学科主题 | Probes - Profilometry |
| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7929]  |
| 专题 | 光电技术研究所_质量处（质检中心） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, P.O .Box 350, Chengdu, China 2.University of Chinese Academy of Sciences, Beijing, China |
| 推荐引用方式 GB/T 7714 | Chen, Lin,Jing, Hongwei,Wei, Zhongwei,et al. Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor[C]. 见:Proceedings of SPIE: 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014. 2015. |
入库方式： OAI收割
来源：光电技术研究所
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