A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes
文献类型：期刊论文
| 作者 | Zhou, Chao1 ; Gong, Zheng2; Chen, Brandon K.2; Cao, Zhiqiang1; Yu, Junzhi1; Ru, Changhai3,4; Tan, Min1; Xie, Shaorong5; Sun, Yu2
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| 刊名 | IEEE-ASME TRANSACTIONS ON MECHATRONICS
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| 出版日期 | 2016-06-01 |
| 卷号 | 21期号:3页码:1233-1241 |
| 关键词 | Nanopositioning nanomanipulation probing nanostructures |
| 通讯作者 | Yu, Sun |
| 中文摘要 | ** |
| 英文摘要 | Probing nanostructures (e.g., nanoelectronics) requires accurate and precise nanopositioning. Furthermore, since measuring I-V data from dc to GHz typically takes more than a minute, tolerance for position drift is stringent during the data collection process. This paper reports a closed-loop controlled nanomanipulation system for operation inside a scanning electron microscope. A new position sensing method with low power consumption is used to achieve nanometer sensing resolution and effective heat dissipation management. For automated probing of nanostructures, the position sensor-based closed-loop probing approach was found to be four times faster than visually servoed probing, and ten times faster compared to manual operation. Probing accuracy was determined to be better than 3 nm and a drift rate lower than 1 nm/min. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical |
| 研究领域[WOS] | Automation & Control Systems ; Engineering |
| 关键词[WOS] | MULTIWALLED CARBON NANOTUBES ; BEAM-INDUCED DEPOSITION ; NANOROBOTIC MANIPULATION ; NANOWIRES |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000375609900004 |
| 源URL | [http://ir.ia.ac.cn/handle/173211/12136]  |
| 专题 | 自动化研究所_复杂系统管理与控制国家重点实验室_先进机器人控制团队 |
| 作者单位 | 1.Chinese Acad Sci, Inst Automat, State Key Lab Management & Control Complex Syst, Beijing 100190, Peoples R China 2.Univ Toronto, Adv Micro & Nanosyst Lab, Toronto, ON M5S 3G8, Canada 3.Soochow Univ, Jiangsu Prov Key Lab Adv Robot, Suzhou 215000, Peoples R China 4.Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215000, Peoples R China 5.Shanghai Univ, Dept Mechatron Engn, Shanghai 200072, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, Chao,Gong, Zheng,Chen, Brandon K.,et al. A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2016,21(3):1233-1241. |
| APA | Zhou, Chao.,Gong, Zheng.,Chen, Brandon K..,Cao, Zhiqiang.,Yu, Junzhi.,...&Sun, Yu.(2016).A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes.IEEE-ASME TRANSACTIONS ON MECHATRONICS,21(3),1233-1241. |
| MLA | Zhou, Chao,et al."A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes".IEEE-ASME TRANSACTIONS ON MECHATRONICS 21.3(2016):1233-1241. |
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来源：自动化研究所
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