环形抛光中倾覆力矩对工件面形的影响及解决方法
文献类型：期刊论文
| 作者 | 焦翔; 朱健强; 樊全堂; 李养帅 |
| 刊名 | 中国激光
 |
| 出版日期 | 2015 |
| 卷号 | 42期号:6页码:608003 |
| 其他题名 | Influence of Overturning Moment to Workpiece Surface Figure in Continuous Polishing and the Solutions |
| 通讯作者 | Jiao Xiang, Key Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Zhu Jianqiang, Key Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Fan Quantang, Key Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Li Yangshuai, Key Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. |
| 中文摘要 | 对环形拋光法加工大小口径工件面形不一致的问题进行了研究。在0.69m环形抛光机上发现,phi100 mm工件面形微凹时,phi48 mm工件为峰谷(PV)值0.336 lambda(lambda=632.8 nm)的凸面形。利用Winkler假定和Preston方程对工件的面形进行了研究,发现倾覆力矩是引起面形不一致的主要原因。对于圆形工件的理论计算结果表明,当工件和抛光盘之间的摩擦系数与分离器对工件的作用力合力的高度的乘积大于工件直径0.125倍时,工件将会变凸。对工件进行了加压、润滑和降低工件支撑位置等实验,发现加压不能改善工件面形一致性;在抛光液中添加润滑剂后一致性有了一定的改善,phi48 mm工件PV值降为0.128 lambda ;而降低工件支持位置后,大小口径工件面形不一致性问题得到了解决,phi48mm工件PV值降为0.058 A,且变为微凹面。此结果表明抛光盘与工件的摩擦系数不能太大,且分离器对工件的支持位置应尽量靠进盘面。 |
| 英文摘要 | The problem that the workpieces with different sizes have different surface figures is studied in the continuous polishing process. The surface shape is a little concave and the peak valley (PV) value is 0.336 lambda (lambda = 632.8 nm) for the phi100 mm workpiece when polished in the 0.69 m continuous polishing machine. However,the phi48 mm workpiece is convex and the PV value is 0.336 lambda . The Winkler's hypothesis and the Preston equation are applied to study the surface shape of the workpiece, then the overturning moment of the workpiece is found to be the main reason for the surface inconformity. The theoretical analysis results show that to the round workpiece, when the product of the friction coefficient between the workpiece and the polishing pad and the resultant force from the separator to the workpiece is larger than 0.125 times diameter of the workpiece, the workpiece will turn to convex. The experiments of workpiece pressing, lubrication and moving down the supporting position of the separator is done. The results show that the consistency isn't been improved by applying pressure on the workpiece; by adding lubricant to the polishing slurry, the consistency is improved as the surface PV of the phi48 mm workpiece is reduced to 0.128 lambda; and the inconsistency problem is solved as the surface PV of the phi48 mm workpiece is reduced to 0.058 lambda and the shape is slightly concave when moving down the supporting position. The results indicate that the friction coefficient between the polishing pad and the workpiece shouldn't be to large and the supporting position of the separator to the workpiece should as near to the polishing surface as possible in the continuous polishing process. |
| 收录类别 | EI |
| 原文出处 | http://www.opticsjournal.net |
| 语种 | 中文 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/14009]  |
| 专题 | 上海光学精密机械研究所_高功率激光物理国家实验室 |
| 作者单位 | 1.焦翔, 中国科学院上海光学精密机械研究所, 强场激光物理国家重点实验室, 上海 201800, 中国. 2.朱健强, 中国科学院上海光学精密机械研究所, 强场激光物理国家重点实验室, 上海 201800, 中国. 3.樊全堂, 中国科学院上海光学精密机械研究所, 强场激光物理国家重点实验室, 上海 201800, 中国. 4.李养帅, 中国科学院上海光学精密机械研究所, 强场激光物理国家重点实验室, 上海 201800, 中国. |
| 推荐引用方式 GB/T 7714 | 焦翔,朱健强,樊全堂,等. 环形抛光中倾覆力矩对工件面形的影响及解决方法[J]. 中国激光,2015,42(6):608003. |
| APA | 焦翔,朱健强,樊全堂,&李养帅.(2015).环形抛光中倾覆力矩对工件面形的影响及解决方法.中国激光,42(6),608003. |
| MLA | 焦翔,et al."环形抛光中倾覆力矩对工件面形的影响及解决方法".中国激光 42.6(2015):608003. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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