铜铝合金溅射薄膜的飞秒激光诱导击穿光谱分析
文献类型：期刊论文
| 作者 | 蔡志龙; 杨秋松; 王阳 |
| 刊名 | 中国激光
 |
| 出版日期 | 2015 |
| 卷号 | 42期号:6页码:615001 |
| 其他题名 | Femtosecond Laser-Induced Breakdown Spectral Analysis of Cu-A1 Alloy Sputtered Thin Films |
| 通讯作者 | Cai Zhilong, Key Laboratory of High Power Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Yang Qiusong, Key Laboratory of High Power Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Wang Yang, Key Laboratory of High Power Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. |
| 中文摘要 | 采用飞秒激光诱导击穿光谱(fs-LIBS)技术研究了铜铝合金溅射薄膜的时间分辨等离子体光谱特性。测量了0~1000 ns延时和100?1000 ns门宽条件下薄膜的激光诱导击穿光谱(LIBS),分析了Al I 396.2 nm谱线的Stark展宽情况,采用定标曲线和自由定标方法对铜铝合金溅射薄膜进行了定量成分分析,并比较了其与靶材成分之间的差异。结合同步瞬态反射率测试对薄膜进行了深度剖析,单脉冲平均取样深度约为90 nm。 |
| 英文摘要 | Femtosecond laser induced breakdown spectroscopy (fs-LIBS) is employed to analyze Cu-Al sputtered thin films. The laser induced plasma spectra at different delay time (0~1000 ns) and gate width (100~1000 ns) are obtained. The Stark broadening effects are analyzed for the Al I line at 396.2 nm. Quantitative component analysis for the thin films is carried out with the calibration curve (CC) and the calibration free (CF) method, respectively. The composition difference between the thin films and corresponding targets is compared as well. Additionally, depth profiling is carried out for Al_(67)Cu_(33) thin films using fs-LIBS combined with a synchronous real-time reflectivity monitoring sub-system. An average ablation depth of 90 nm per pulse is observed at the laser energy of 0.2 mJ. |
| 收录类别 | EI |
| 原文出处 | http://www.opticsjournal.net |
| 语种 | 中文 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13845]  |
| 专题 | 上海光学精密机械研究所_高密度光存储技术实验室 |
| 作者单位 | 1.蔡志龙, 中国科学院上海光学精密机械研究所, 中国科学院强激光材料重点实验室, 上海 201800, 中国. 2.杨秋松, 中国科学院上海光学精密机械研究所, 中国科学院强激光材料重点实验室, 上海 201800, 中国. 3.王阳, 中国科学院上海光学精密机械研究所, 中国科学院强激光材料重点实验室, 上海 201800, 中国. |
| 推荐引用方式 GB/T 7714 | 蔡志龙,杨秋松,王阳. 铜铝合金溅射薄膜的飞秒激光诱导击穿光谱分析[J]. 中国激光,2015,42(6):615001. |
| APA | 蔡志龙,杨秋松,&王阳.(2015).铜铝合金溅射薄膜的飞秒激光诱导击穿光谱分析.中国激光,42(6),615001. |
| MLA | 蔡志龙,et al."铜铝合金溅射薄膜的飞秒激光诱导击穿光谱分析".中国激光 42.6(2015):615001. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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