Mechanical property measurements of nanofilm by microbump method induced by laser pulse
文献类型：期刊论文
| 作者 | Dun, Aihuan; Wei, Jingsong |
| 刊名 | appl. phys. a-mater. sci. process.
 |
| 出版日期 | 2015 |
| 卷号 | 121期号:4页码:1425 |
| 通讯作者 | dun, ah (reprint author), chinese acad sci, shanghai inst opt & fine mech, shanghai 201800, peoples r china. |
| 英文摘要 | a laser pulse-induced microbump method that aims to measure the mechanical properties of nanofilms is proposed. the sample structure is designed as 'substrate/ago (x) (active layer)/zns-sio2 (nanofilm)' and the laser pulse is applied to heat the active layer and to create a microbump. the deflections of the microbumps are measured precisely by atomic force microscopy by taking ago (x) and zns-sio2 as the active layer and nanofilm, respectively, and by controlling the pulse laser parameters. by transforming the laser power-deflection curve to a pressure-deflection curve, the calculation equations of mechanical properties were strictly derived according to the action principle of a gaussian intensity profile pulse laser with material and traditional bulge testing equations. the mechanical properties of a zns-sio2 film with only 10-nm thickness were calculated according to the derived equations. the results of the zns-sio2 film are as follows: residual stress is 0.129 mpa, young's modulus is 0.441 mpa, and poisson's ratio is 0.217. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13909]  |
| 专题 | 上海光学精密机械研究所_高密度光存储技术实验室 |
| 作者单位 | 1.[Dun, Aihuan 2.Wei, Jingsong] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 3.[Dun, Aihuan] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Dun, Aihuan,Wei, Jingsong. Mechanical property measurements of nanofilm by microbump method induced by laser pulse[J]. appl. phys. a-mater. sci. process.,2015,121(4):1425. |
| APA | Dun, Aihuan,&Wei, Jingsong.(2015).Mechanical property measurements of nanofilm by microbump method induced by laser pulse.appl. phys. a-mater. sci. process.,121(4),1425. |
| MLA | Dun, Aihuan,et al."Mechanical property measurements of nanofilm by microbump method induced by laser pulse".appl. phys. a-mater. sci. process. 121.4(2015):1425. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。