中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Performance improvement of super-resolving pupil filters via combination with nonlinear saturable absorption films

文献类型:期刊论文

作者Zha, Yikun; Wei, Jingsong; Gan, Fuxi
刊名opt. commun.
出版日期2013
卷号293页码:139
通讯作者wei, js (reprint author), chinese acad sci, shanghai inst opt & fine mech, shanghai 201800, peoples r china.
英文摘要with the continuous development of the field of information technology, there has been a demand for recording mark size of optical data storage, optical imaging resolving power, and characteristic linewidth of photolithography to reach nanoscale. however, it is very difficult to realize the goal due to the optical diffraction limit restrictions. much interest has focused on the study of optical far-field super-resolution spot by using pupil filters. however, common concerns have continued to plague super-resolving pupil filters based on either scalar diffraction theory or vector diffraction theory. these concerns include the fact that the side lobe becomes non-negligible when the central lobe is squeezed to a certain extent. moreover, it is difficult to reduce the super-resolving spot to nanoscale. in this work, we proposed a novel method to combine the super-resolving pupil filters with nonlinear saturable absorption thin films to reduce the central spot size to nanoscale, lower the intensity ratio of side lobe to central lobe, and elongate the depth of focus or tunable tolerance distance between the super-resolving spot and sample. the simulated results indicate that by using the three-zone annular binary phase filter as the super-resolving pupil filter and sb2te3 as the nonlinear saturable absorption thin films, the central spot size can be reduced to nanoscale, the side lobe intensity is squeezed to about 10% of the central lobe intensity, and the tunable tolerance distance between the super-resolving spot and the sample is about two times that of the depth of focus of the diffraction limited spot at the incident laser wavelength of 405 nm and the numerical aperture of focusing lens of 0.95. the combination of the super-resolving pupil filters with the nonlinear saturable absorption thin films is very useful for nano-optical data storage, maskless nanolithography, and nano-optical imaging. it is also easy to use in actual applications because of the operation in the far-field range. (c) 2012 elsevier b.v. all rights reserved.
收录类别SCI
语种英语
版本出版稿
源URL[http://ir.siom.ac.cn/handle/181231/15012]  
专题上海光学精密机械研究所_高密度光存储技术实验室
作者单位1.[Zha, Yikun
2.Wei, Jingsong
3.Gan, Fuxi] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
4.[Zha, Yikun] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式
GB/T 7714
Zha, Yikun,Wei, Jingsong,Gan, Fuxi. Performance improvement of super-resolving pupil filters via combination with nonlinear saturable absorption films[J]. opt. commun.,2013,293:139.
APA Zha, Yikun,Wei, Jingsong,&Gan, Fuxi.(2013).Performance improvement of super-resolving pupil filters via combination with nonlinear saturable absorption films.opt. commun.,293,139.
MLA Zha, Yikun,et al."Performance improvement of super-resolving pupil filters via combination with nonlinear saturable absorption films".opt. commun. 293(2013):139.

入库方式: OAI收割

来源:上海光学精密机械研究所

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