用离子束溅射方法制备的钛薄膜表面形貌分析
文献类型：期刊论文
| 作者 | 齐红基; 程传福; 袁景梅; 邵建达; 范正修 |
| 刊名 | 光学学报
 |
| 出版日期 | 2003 |
| 卷号 | 23期号:4页码:480 |
| 其他题名 | Morphology Analysis of Titanic Thin Film Prepared by Ion Beam Sputtering |
| 中文摘要 | 用离子束溅工艺在K9玻璃基片上沉积Ti薄膜，并用原子力显微镜对其表面形貌进行测量，通过数值相关运算，发现在此工艺条件下薄膜生长界面为各向同性的自仿射分形表面，并用粗糙指数、横向相关长度和标准偏差粗糙度对薄膜样品表面进行定量描述。利用自仿射分形表面的相关函数对数值运算的结果进行拟合，得出Ti薄膜生长界面的粗糙度指数alpha = 0.72，相应的分形维数D_f = 2.28，并由此得到在离子束溅射工艺下Ti薄膜属于守恒生长的结论，其生长动力学过程可用Kuramoto-Sivashinsky方程来描述。 |
| 英文摘要 | Titanic thin films have been prepared on K9 substrates by ion beam sputtering method. The surface morphology is studied by using atomic force microscopy (AFM). The images show that surface is isotropic and self-affine. The surface can be quantitatively described by the roughness exponent a, the lateral correlation length xi, and the interface width w. The value a of the Ti film is measured to be 0.72, which gives the related local surface fractal dimension D_s = 2.28. From these values, it is suggested that the growth of Ti film is more consistent with a conservative growth process and can be described by using a noisy Kuramoto-Sivashinsky equation. |
| 收录类别 | EI |
| 语种 | 中文 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/18224]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 作者单位 | 1.Qi Hongji, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 2.Cheng Chuanfu, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 3.Yuan Jingmei, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 4.Shao Jianda, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 5.Fan Zhengxiu, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. |
| 推荐引用方式 GB/T 7714 | 齐红基,程传福,袁景梅,等. 用离子束溅射方法制备的钛薄膜表面形貌分析[J]. 光学学报,2003,23(4):480. |
| APA | 齐红基,程传福,袁景梅,邵建达,&范正修.(2003).用离子束溅射方法制备的钛薄膜表面形貌分析.光学学报,23(4),480. |
| MLA | 齐红基,et al."用离子束溅射方法制备的钛薄膜表面形貌分析".光学学报 23.4(2003):480. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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