霍尔源用于光学镀膜
文献类型：期刊论文
| 作者 | 贾克辉; 黄建兵; 徐颖; 陈红; 高劲松; 曹建林 |
| 刊名 | 光子学报
 |
| 出版日期 | 2003 |
| 卷号 | 32期号:10页码:1228 |
| 其他题名 | Hall Ion Source for Thin-film Coatings |
| 中文摘要 | 报道了用于辅助镀膜的无栅霍尔离子体源的结构原理及性能指标，并从光学特性、显微特性和机械特性三方面着手，研究了使用霍尔源所做的单层TiO_2膜的成膜工艺与质量。研究表明，使用霍尔源辅助沉积的光学膜折射率明显提高，更加接近于块状材料，膜层结构比传统沉积手段更加致密，附着力也很高。同时用此项技术沉积了金属增强反射镜，试验结果与理论设计结果相符，达到了理想要求。 |
| 英文摘要 | The theory and properties of End-Hall ion source are reported. The research to the quality and productive technology of TiO2 coatings that are produced by using Hall ion source is made in three respective properties including optical property, micro-structure, and mechanism property. The research shows that the index of optical coating increases remarkably by using plasma ion assisted deposition and approaches to the massive material further, the coating structure is more compacted than the one obtained through conventional deposition method and the adhesive power is high as well. Meantime an enhanced metal reflector is produced through this technique and the subsequent result of experiment is in accordance to the one designed, finally the objective of the design is met. |
| 收录类别 | CSCD |
| 语种 | 中文 |
| CSCD记录号 | CSCD:1163651 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/18259]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 作者单位 | 1.Jia Kehui, State Key Lab of Applied Optics, Changchun Institute Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130022, China. 2.Xu Ying, State Key Lab of Applied Optics, Changchun Institute Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130022, China. 3.Chen Hong, State Key Lab of Applied Optics, Changchun Institute Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130022, China. 4.Gao Jinsong, State Key Lab of Applied Optics, Changchun Institute Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130022, China. 5.Cao Jianlin, State Key Lab of Applied Optics, Changchun Institute Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130022, China. 6.Huang Jianbing, R&D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sicences, Shanghai 201800, China. |
| 推荐引用方式 GB/T 7714 | 贾克辉,黄建兵,徐颖,等. 霍尔源用于光学镀膜[J]. 光子学报,2003,32(10):1228. |
| APA | 贾克辉,黄建兵,徐颖,陈红,高劲松,&曹建林.(2003).霍尔源用于光学镀膜.光子学报,32(10),1228. |
| MLA | 贾克辉,et al."霍尔源用于光学镀膜".光子学报 32.10(2003):1228. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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