中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
激光纳米尺度先进加工技术

文献类型:期刊论文

作者黄英奇; 程兆谷; 谌巍; 赵全忠; 高海军; 柴雄良
刊名激光与光电子学进展
出版日期2003
卷号40期号:7页码:20
其他题名Advanced Laser Material Nanoprocessing Techniques
中文摘要综述了激光-扫描探针显微镜(Laser-SPM)纳米尺度加工先进技术及激光纳米结构先进加工技术。
英文摘要The advanced teclmology of laser-scanning probe microscope (SPM) nanoprocessing is presented and some other laser nanoprossessing techniques is concerned as well.
收录类别CSCD
语种中文
CSCD记录号CSCD:1236525
版本出版稿
源URL[http://ir.siom.ac.cn/handle/181231/18296]  
专题上海光学精密机械研究所_精密光电测控研究与发展中心
作者单位1.Hang Yingqi, Dept. of Phys., Quanzhou Normal College, Fujian 362000, China.
2.Cheng Zhaogu, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
3.Zhao Quanzhong, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
4.Gao Haijun, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
5.Shen Wei, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
6.Chai Xiongliang, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
推荐引用方式
GB/T 7714
黄英奇,程兆谷,谌巍,等. 激光纳米尺度先进加工技术[J]. 激光与光电子学进展,2003,40(7):20.
APA 黄英奇,程兆谷,谌巍,赵全忠,高海军,&柴雄良.(2003).激光纳米尺度先进加工技术.激光与光电子学进展,40(7),20.
MLA 黄英奇,et al."激光纳米尺度先进加工技术".激光与光电子学进展 40.7(2003):20.

入库方式: OAI收割

来源:上海光学精密机械研究所

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