激光纳米尺度先进加工技术
文献类型:期刊论文
作者 | 黄英奇; 程兆谷; 谌巍; 赵全忠; 高海军; 柴雄良 |
刊名 | 激光与光电子学进展
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出版日期 | 2003 |
卷号 | 40期号:7页码:20 |
其他题名 | Advanced Laser Material Nanoprocessing Techniques |
中文摘要 | 综述了激光-扫描探针显微镜(Laser-SPM)纳米尺度加工先进技术及激光纳米结构先进加工技术。 |
英文摘要 | The advanced teclmology of laser-scanning probe microscope (SPM) nanoprocessing is presented and some other laser nanoprossessing techniques is concerned as well. |
收录类别 | CSCD |
语种 | 中文 |
CSCD记录号 | CSCD:1236525 |
版本 | 出版稿 |
源URL | [http://ir.siom.ac.cn/handle/181231/18296] ![]() |
专题 | 上海光学精密机械研究所_精密光电测控研究与发展中心 |
作者单位 | 1.Hang Yingqi, Dept. of Phys., Quanzhou Normal College, Fujian 362000, China. 2.Cheng Zhaogu, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 3.Zhao Quanzhong, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 4.Gao Haijun, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 5.Shen Wei, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. 6.Chai Xiongliang, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China. |
推荐引用方式 GB/T 7714 | 黄英奇,程兆谷,谌巍,等. 激光纳米尺度先进加工技术[J]. 激光与光电子学进展,2003,40(7):20. |
APA | 黄英奇,程兆谷,谌巍,赵全忠,高海军,&柴雄良.(2003).激光纳米尺度先进加工技术.激光与光电子学进展,40(7),20. |
MLA | 黄英奇,et al."激光纳米尺度先进加工技术".激光与光电子学进展 40.7(2003):20. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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