UV-visible spectral characterization and density functional theory simulation analysis on laser-induced crystallization of amorphous silicon thin films
文献类型：期刊论文
| 作者 | Huang Lu; Jin Jing; Shi Wei-Min; Yuan Zhi-Jun; Yang Wei-Guang; Cao Ze-Chun; Wang Lin-Jun; Zhou Jun; Lou Qi-Hong |
| 刊名 | chin. phys. b
 |
| 出版日期 | 2014 |
| 卷号 | 23期号:3页码:34208 |
| 关键词 | laser crystallization UV-visible spectra density functional theory simulation |
| 通讯作者 | huang, l (reprint author), shanghai univ, sch mat sci & engn, shanghai 200072, peoples r china. |
| 英文摘要 | the effect of laser energy density on the crystallization of hydrogenated intrinsic amorphous silicon (a-si:h) thin films was studied both theoretically and experimentally. the thin films were irritated by a frequency-doubled (lambda = 532 nm) nd:yag pulsed nanosecond laser. an effective density functional theory model was built to reveal the variation of bandgap energy influenced by thermal stress after laser irradiation. experimental results establish correlation between the thermal stress and the shift of transverse optical peak in raman spectroscopy and suggest that the relatively greater shift of the transverse optical (to) peak can produce higher stress. the highest crystalline fraction (84.5%) is obtained in the optimized laser energy density (1000 mj/cm(2)) with a considerable stress release. the absorption edge energy measured by the uv-visible spectra is in fairly good agreement with the bandgap energy in the density functional theory (dft) simulation. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13072]  |
| 专题 | 上海光学精密机械研究所_空间激光信息技术研究中心 |
| 作者单位 | 1.[Huang Lu 2.Jin Jing 3.Shi Wei-Min 4.Yang Wei-Guang 5.Cao Ze-Chun 6.Wang Lin-Jun] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China 7.[Yuan Zhi-Jun 8.Zhou Jun 9.Lou Qi-Hong] Chinese Acad Sci, Novel Laser Tech & Applicat Syst Lab, Shanghai Inst O |
| 推荐引用方式 GB/T 7714 | Huang Lu,Jin Jing,Shi Wei-Min,et al. UV-visible spectral characterization and density functional theory simulation analysis on laser-induced crystallization of amorphous silicon thin films[J]. chin. phys. b,2014,23(3):34208. |
| APA | Huang Lu.,Jin Jing.,Shi Wei-Min.,Yuan Zhi-Jun.,Yang Wei-Guang.,...&Lou Qi-Hong.(2014).UV-visible spectral characterization and density functional theory simulation analysis on laser-induced crystallization of amorphous silicon thin films.chin. phys. b,23(3),34208. |
| MLA | Huang Lu,et al."UV-visible spectral characterization and density functional theory simulation analysis on laser-induced crystallization of amorphous silicon thin films".chin. phys. b 23.3(2014):34208. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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