Effects of prism beam expander and slits on excimer laser linewidth narrowing module
文献类型：期刊论文
| 作者 | Zhang, Haibo; Yuan, Zhijun; Zhou, Jun; Wei, Yunrong; Lou, Qihong |
| 刊名 | chin. opt. lett.
 |
| 出版日期 | 2013 |
| 卷号 | 11期号:4页码:41405 |
| 通讯作者 | yuan, zj (reprint author), chinese acad sci, shanghai inst opt & fine mech, shanghai 201800, peoples r china. |
| 英文摘要 | theoretical simulation and experiments based on a prism beam expander and an echelle grating are conducted to study the dependence of linewidth and pulse energy on incidence angle and slit width. with a larger prism incident angle or narrower slit width, the linewidth becomes narrower while the laser pulse energy becomes lower. however, the pulse energy can be improved by optimally designing the prism beam expander. in addition, a subpicometer linewidth arf laser is obtained with a double-prism beam expander and an echelle grating. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/14974]  |
| 专题 | 上海光学精密机械研究所_空间激光信息技术研究中心 |
| 作者单位 | 1.[Zhang, Haibo 2.Yuan, Zhijun 3.Zhou, Jun 4.Wei, Yunrong 5.Lou, Qihong] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 6.[Zhang, Haibo 7.Yuan, Zhijun 8.Zhou, Jun 9.Wei, Yunrong 10.Lou, Qihong] Shanghai Key Lab All Solid State Laser & Appl Tec, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Haibo,Yuan, Zhijun,Zhou, Jun,et al. Effects of prism beam expander and slits on excimer laser linewidth narrowing module[J]. chin. opt. lett.,2013,11(4):41405. |
| APA | Zhang, Haibo,Yuan, Zhijun,Zhou, Jun,Wei, Yunrong,&Lou, Qihong.(2013).Effects of prism beam expander and slits on excimer laser linewidth narrowing module.chin. opt. lett.,11(4),41405. |
| MLA | Zhang, Haibo,et al."Effects of prism beam expander and slits on excimer laser linewidth narrowing module".chin. opt. lett. 11.4(2013):41405. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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