Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining
文献类型：期刊论文
| 作者 | Lin, Jintian; Xu, Yingxin; Tang, Jialei; Wang, Nengwen; Song, Jiangxin; He, Fei; Fang, Wei; Cheng, Ya |
| 刊名 | appl. phys. a-mater. sci. process.
 |
| 出版日期 | 2014 |
| 卷号 | 116期号:4页码:2019 |
| 关键词 | MONOLITHIC MICRORESONATOR MICROCAVITIES GENERATION MODES CHIP |
| 通讯作者 | cheng, y (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, shanghai 201800, peoples r china. |
| 英文摘要 | we report on fabrication of on-chip calcium fluoride (caf2) microdisk resonators using water-assisted femtosecond laser micromachining. focused ion beam (fib) milling is used to create ultra-smooth sidewalls. the quality (q) factors of the fabricated microresonators are measured to be 4.2 x 10(4) at wavelengths near 1,550 nm. the q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. this technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/12997]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 1.[Lin, Jintian 2.Tang, Jialei 3.Wang, Nengwen 4.Song, Jiangxin 5.He, Fei 6.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 7.[Lin, Jintian 8.Tang, Jialei 9.Song, Jiangxin] Univ Chine |
| 推荐引用方式 GB/T 7714 | Lin, Jintian,Xu, Yingxin,Tang, Jialei,et al. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining[J]. appl. phys. a-mater. sci. process.,2014,116(4):2019. |
| APA | Lin, Jintian.,Xu, Yingxin.,Tang, Jialei.,Wang, Nengwen.,Song, Jiangxin.,...&Cheng, Ya.(2014).Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining.appl. phys. a-mater. sci. process.,116(4),2019. |
| MLA | Lin, Jintian,et al."Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining".appl. phys. a-mater. sci. process. 116.4(2014):2019. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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