Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining
文献类型：期刊论文
| 作者 | Sugioka, Koji; Cheng, Ya |
| 刊名 | appl. phys. a-mater. sci. process.
 |
| 出版日期 | 2014 |
| 卷号 | 114期号:1页码:215 |
| 关键词 | ON-A-CHIP PHOTOSENSITIVE GLASS TRANSPARENT MATERIALS INTEGRATION CHANNEL PULSES DEVICE MICROFABRICATION SILICA CELLS |
| 通讯作者 | sugioka, k (reprint author), riken, laser technol lab, 2-1 hirosawa, wako, saitama 3510198, japan. |
| 英文摘要 | femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. one of the most important features of femtosecond laser processing is that a femtosecond laser beam can induce strong absorption in even transparent materials due to nonlinear multiphoton absorption. this makes it possible to directly create three-dimensional (3d) microfluidic structures in glass that are of great use for fabrication of biochips. for fabrication of the 3d microfluidic structures, two technical approaches are being attempted. one of them employs femtosecond laser-induced internal modification of glass followed by wet chemical etching using an acid solution (femtosecond laser-assisted wet chemical etching), while the other one performs femtosecond laser 3d ablation of the glass in distilled water (liquid-assisted femtosecond laser drilling). this paper provides a review on these two techniques for fabrication of 3d micro and nanofluidic structures in glass based on our development and experimental results. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13571]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 1.[Sugioka, Koji] RIKEN, Laser Technol Lab, Wako, Saitama 3510198, Japan 2.[Cheng, Ya] Chinese Acad Sci, State Key Lab High Field Laser Phys, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sugioka, Koji,Cheng, Ya. Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining[J]. appl. phys. a-mater. sci. process.,2014,114(1):215. |
| APA | Sugioka, Koji,&Cheng, Ya.(2014).Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining.appl. phys. a-mater. sci. process.,114(1),215. |
| MLA | Sugioka, Koji,et al."Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining".appl. phys. a-mater. sci. process. 114.1(2014):215. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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