Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications
文献类型：期刊论文
| 作者 | Liao, Yang; Cheng, Ya |
| 刊名 | micromachines
 |
| 出版日期 | 2014 |
| 卷号 | 5期号:4页码:1106 |
| 关键词 | femtosecond laser 3D fabrication microfluidics nanofluidics porous glass |
| 通讯作者 | cheng, y (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, pob 800-211, shanghai 201800, peoples r china. |
| 英文摘要 | the creation of complex three-dimensional (3d) fluidic systems composed of hollow micro- and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. however, it is by now still a formidable challenge to build 3d micro- and nanofluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. as a direct and maskless fabrication technique, femtosecond laser micromachining provides a straightforward approach for high-precision, spatially-selective, modification inside transparent materials through nonlinear optical absorption. in this paper, we demonstrate rapid fabrication of high-aspect-ratio micro- and/or nanofluidic structures with various 3d configurations by femtosecond laser direct writing in porous glass substrates. based on this approach, we demonstrate several functional micro- and nanofluidic devices including a 3d passive microfluidic mixer, a capillary electrophoresis (ce) analysis chip, and an integrated micro-nanofluidic system for single dna analysis. the possible mechanisms behind the formation of high-aspect-ratio micro- and nanochannels are also discussed. this technology offers new opportunities to develop novel 3d micro-nanofluidic systems for a variety of lab-on-a-chip applications. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13616]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 1.[Liao, Yang 2.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liao, Yang,Cheng, Ya. Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications[J]. micromachines,2014,5(4):1106. |
| APA | Liao, Yang,&Cheng, Ya.(2014).Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications.micromachines,5(4),1106. |
| MLA | Liao, Yang,et al."Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications".micromachines 5.4(2014):1106. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。