Fabrication of optical microcavities with femtosecond laser pulses
文献类型：会议论文
| 作者 | Lin, Jintian; Song, Jiangxin; Tang, Jialei; Fang, Wei; Sugioka, Koji; Cheng, Ya |
| 出版日期 | 2014 |
| 会议名称 | conference on laser resonators, microresonators, and beam control xvi |
| 通讯作者 | lin, jt (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, pob 800-211, shanghai 201800, peoples r china. |
| 英文摘要 | we report on fabrication of three-dimensional (3d) high-quality (q) whispering-gallery-mode microcavities by femtosecond laser micromachining. the main fabrication procedures include the formation of on-chip freestanding microdisk through selective material removal by femtosecond laser pulses, followed by surface smoothing processes (co2 laser reflow for amorphous glass and focused ion beam (fib) sidewall milling for crystalline materials) to improve the q factors. fused silica microcavities with 3d geometries are demonstrated with q factors exceeding 10(6). a microcavity laser based on nd:glass has been fabricated, showing a threshold as low as 69 mu w via free space continuous-wave optical excitation at the room temperature. caf2 crystalline microcavities with q factor of similar to 4.2x10(4) have also been demonstrated. this technique allows us to fabricate 3d high-q microcavities in various transparent materials such as glass and crystals, which will benefit a broad spectrum of applications such as nonlinear optics, quantum optics, and bio-sensing. |
| 会议录 | laser resonators, microresonators, and beam control xvi
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17213]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 1.[Lin, Jintian 2.Song, Jiangxin 3.Tang, Jialei 4.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Lin, Jintian,Song, Jiangxin,Tang, Jialei,et al. Fabrication of optical microcavities with femtosecond laser pulses[C]. 见:conference on laser resonators, microresonators, and beam control xvi. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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