Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips
文献类型：会议论文
| 作者 | Cheng, Ya; Liao, Yang; Sugioka, Koji |
| 出版日期 | 2014 |
| 会议名称 | conference on laser applications in microelectronic and optoelectronic manufacturing (lamom) xix |
| 通讯作者 | cheng, y (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, pob 800-211, shanghai 201800, peoples r china. |
| 英文摘要 | the creation of complex three-dimensional (3d) fluidic systems composed of hollow micro-and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. however, it is by now still a formidable challenge to build 3d micro-and nanofluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. as a direct and maskless fabrication technique, femtosecond laser micromachining provides a straightforward approach for high-precision spatial-selective modification inside transparent materials through nonlinear optical absorption. here, we demonstrate rapid fabrication of high-aspect-ratio micro-and/or nanofluidic structures with various 3d configurations in glass substrates by femtosecond laser direct writing. based on this approach, we demonstrate several functional micro-and nanofluidic devices including a 3d passive microfluidic mixer, a capillary electrophoresis (ce) analysis chip, and an integrated micro-nanofluidic system for single dna analysis. this technology offers new opportunities to develop novel 3d micro-nanofluidic systems for a variety of lab-on-a-chip applications. |
| 会议录 | laser applications in microelectronic and optoelectronic manufacturing (lamom) xix
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17215]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 1.[Cheng, Ya 2.Liao, Yang] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Cheng, Ya,Liao, Yang,Sugioka, Koji. Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips[C]. 见:conference on laser applications in microelectronic and optoelectronic manufacturing (lamom) xix. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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