Thermal, structural and optical properties of NiOx thin films deposited by reactive dc-magnetron sputtering
文献类型：期刊论文
| 作者 | Zhou Ying ; Gu DH(顾冬红) ; Geng Yongyou ; Gan FX(干福熹) |
| 刊名 | mater. sci. eng. b
 |
| 出版日期 | 2006 |
| 卷号 | 135期号:2页码:125 |
| 关键词 | NiOx thin films thermal properties structure properties optical properties optical recording materials |
| ISSN号 | 0921-5107 |
| 中文摘要 | the niox thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in ar + o-2 with the relative o-2 content 5%. the as-deposited niox, thin films could represent a two-component system comprising crystalline nio particles dispersed in an amorphous ni2o3. decomposition temperature of the as-deposited nio, thin films was at about 263 degrees c. after annealed at 400 degrees c for 30 min in air, the surface morphology of the films became very rough due to the decomposition of the ni2o3, leading to the changes of the optical properties of the nio, thin films. the reflectivity of the films annealed at 400 degrees c was lower than that of the as-deposited one and the optical contrast was 52% at 405 nm. (c) 2006 elsevier b.v. all rights reserved. |
| 学科主题 | 光存储 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000242509300008 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/3827]  |
| 专题 | 上海光学精密机械研究所_高密度光存储技术实验室 |
| 推荐引用方式 GB/T 7714 | Zhou Ying,Gu DH,Geng Yongyou,et al. Thermal, structural and optical properties of NiOx thin films deposited by reactive dc-magnetron sputtering[J]. mater. sci. eng. b,2006,135(2):125, 128. |
| APA | Zhou Ying,顾冬红,Geng Yongyou,&干福熹.(2006).Thermal, structural and optical properties of NiOx thin films deposited by reactive dc-magnetron sputtering.mater. sci. eng. b,135(2),125. |
| MLA | Zhou Ying,et al."Thermal, structural and optical properties of NiOx thin films deposited by reactive dc-magnetron sputtering".mater. sci. eng. b 135.2(2006):125. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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