High-efficiency fused-silica reflection grism
文献类型:期刊论文
作者 | Cao, Hongchao; Zhou, Changhe; Ma, Jianyong; Wu, Jun; Li, Shubin |
刊名 | appl. optics
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出版日期 | 2014 |
卷号 | 53期号:13页码:2802 |
关键词 | TOTAL INTERNAL-REFLECTION DIFFRACTION GRATINGS DESIGN POLARIZATION |
通讯作者 | zhou, ch (reprint author), chinese acad sci, shanghai inst opt & fine mech, 390 qinghe rd, shanghai 201800, peoples r china. |
英文摘要 | a fused-silica reflection grism (combination of grating and prism) based on the phenomenon of total internal reflection (tir), and used in the -1st order, is designed and fabricated. the grism is etched directly into the fused-silica prism, which greatly facilitates the use of the tir grating as no other angle coupling devices are involved. the grating profile is optimized by the use of the rigorous coupled-wave analysis method. diffraction efficiency of larger than 99% at a wavelength of 980 nm for tm-polarized waves can be theoretically obtained. two-beam interference lithography and inductively coupled plasma etching techniques are used to manufacture such grism. diffraction efficiencies of larger than 95% are experimentally demonstrated. (c) 2014 optical society of america |
收录类别 | SCI |
语种 | 英语 |
版本 | 出版稿 |
源URL | [http://ir.siom.ac.cn/handle/181231/12989] ![]() |
专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
作者单位 | 1.[Cao, Hongchao 2.Zhou, Changhe 3.Ma, Jianyong 4.Wu, Jun 5.Li, Shubin] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China |
推荐引用方式 GB/T 7714 | Cao, Hongchao,Zhou, Changhe,Ma, Jianyong,et al. High-efficiency fused-silica reflection grism[J]. appl. optics,2014,53(13):2802. |
APA | Cao, Hongchao,Zhou, Changhe,Ma, Jianyong,Wu, Jun,&Li, Shubin.(2014).High-efficiency fused-silica reflection grism.appl. optics,53(13),2802. |
MLA | Cao, Hongchao,et al."High-efficiency fused-silica reflection grism".appl. optics 53.13(2014):2802. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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