Parallel laser writing system with scanning Dammann lithography
文献类型：期刊论文
| 作者 | Zhu, Feng; Ma, Jianyong; Huang, Wei; Wang, Jin; Zhou, Changhe |
| 刊名 | chin. opt. lett.
 |
| 出版日期 | 2014 |
| 卷号 | 12期号:8页码:80501 |
| 关键词 | BEAM INTERFERENCE LITHOGRAPHY FABRICATION |
| 通讯作者 | zhou, ch (reprint author), chinese acad sci, shanghai inst opt & fine mech, lab informat opt & optoelect tech, shanghai 201800, peoples r china. |
| 英文摘要 | scanning dammann lithography (sdl) is proposed and implemented, which uses a dammann grating to generate multiple beams with sharp step boundary for writing large-sized gratings efficiently. one of the most attractive advantages is that this technique can accelerate the writing speed, e.g. 1 x 32 dammann grating can be 32 times faster than the single laser scanning system. more importantly, the uniformity of the multi-beams-written lines is much better than the single laser beam scanning system in consideration of the environmental effects such as air turbulence, thermal instability, etc. using the sdl system, a three-port high-efficiency beam splitter at visible wavelengths is fabricated quickly, and the theoretical and experimental diffraction efficiencies are both higher than 90%. therefore, sdl should be a useful tool for fabrication of large-sized gratings. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13061]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Zhu, Feng 2.Ma, Jianyong 3.Huang, Wei 4.Wang, Jin 5.Zhou, Changhe] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Tech, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhu, Feng,Ma, Jianyong,Huang, Wei,et al. Parallel laser writing system with scanning Dammann lithography[J]. chin. opt. lett.,2014,12(8):80501. |
| APA | Zhu, Feng,Ma, Jianyong,Huang, Wei,Wang, Jin,&Zhou, Changhe.(2014).Parallel laser writing system with scanning Dammann lithography.chin. opt. lett.,12(8),80501. |
| MLA | Zhu, Feng,et al."Parallel laser writing system with scanning Dammann lithography".chin. opt. lett. 12.8(2014):80501. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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