Study of active beam steering system with a simple method
文献类型：期刊论文
| 作者 | Wang, Jun; Huang, Lihua; Hou, Liying; He, Guojun; Song, Qiang; Huang, Huijie |
| 刊名 | chin. opt. lett.
 |
| 出版日期 | 2014 |
| 卷号 | 12期号:8页码:81405 |
| 关键词 | POINTING STABILIZATION ADAPTIVE OPTICS LASER |
| 通讯作者 | huang, lh (reprint author), chinese acad sci, shanghai inst opt & fine mech, shanghai 201800, peoples r china. |
| 英文摘要 | we develope a simple method to stabilize the beam during propagation. combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration and average filter. the results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 mu rad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 mu m respectively. the regulating time is within 84 ms. thus the method presented is effective for the current stabilization system applied in lithography tools. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13062]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Wang, Jun 2.Huang, Lihua 3.Hou, Liying 4.He, Guojun 5.Song, Qiang 6.Huang, Huijie] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Jun,Huang, Lihua,Hou, Liying,et al. Study of active beam steering system with a simple method[J]. chin. opt. lett.,2014,12(8):81405. |
| APA | Wang, Jun,Huang, Lihua,Hou, Liying,He, Guojun,Song, Qiang,&Huang, Huijie.(2014).Study of active beam steering system with a simple method.chin. opt. lett.,12(8),81405. |
| MLA | Wang, Jun,et al."Study of active beam steering system with a simple method".chin. opt. lett. 12.8(2014):81405. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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