Efficient source mask optimization using multipole source representation
文献类型：期刊论文
| 作者 | Yang, Chaoxing; Li, Sikun; Wang, Xiangzhao |
| 刊名 | j. micro-nanolithogr. mems moems
 |
| 出版日期 | 2014 |
| 卷号 | 13期号:4页码:43001 |
| 关键词 | source mask optimization genetic algorithm source representation pupil filling ratio |
| 通讯作者 | wang, xz (reprint author), chinese acad sci, shanghai inst opt & fine mech, lab informat opt & optoelect technol, 390 qinghe rd, shanghai 201800, peoples r china. |
| 英文摘要 | source mask optimization (smo) is one of the required techniques for lithography below 32 nm. source representation is one important factor that affects both the imaging simulation and optimization processes of smo, especially the global smos such as the smo using genetic algorithm (ga-smo). we propose a source representation which accelerates the ga-smo. the proposed representation uses a group of circular poles to describe the freeform illumination source whose pupil filling ratio (pfr) is small. compared with conventional cartesian-grid and polar-grid pixelated representations, the proposed multipole source representation can represent the low-pfr freeform illumination source with fewer variables, which speeds up both the ga convergence and lithography imaging simulation. numerical experiments show that the ga-smo using the proposed multipole source representation method is about seven times faster than that using polar-grid pixelated source representation on the premise that other simulation conditions are the same and optimization qualities are comparable. (c) 2014 society of photo-optical instrumentation engineers (spie) |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13692]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Yang, Chaoxing 2.Li, Sikun 3.Wang, Xiangzhao] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China 4.[Yang, Chaoxing 5.Wang, Xiangzhao] Univ Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yang, Chaoxing,Li, Sikun,Wang, Xiangzhao. Efficient source mask optimization using multipole source representation[J]. j. micro-nanolithogr. mems moems,2014,13(4):43001. |
| APA | Yang, Chaoxing,Li, Sikun,&Wang, Xiangzhao.(2014).Efficient source mask optimization using multipole source representation.j. micro-nanolithogr. mems moems,13(4),43001. |
| MLA | Yang, Chaoxing,et al."Efficient source mask optimization using multipole source representation".j. micro-nanolithogr. mems moems 13.4(2014):43001. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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