Aberration measurement based on principal component analysis of aerial images of optimized marks
文献类型：期刊论文
| 作者 | Yan, Guanyong; Wang, Xiangzhao; Li, Sikun; Yang, Jishuo; Xu, Dongbo |
| 刊名 | opt. commun.
 |
| 出版日期 | 2014 |
| 卷号 | 329页码:63 |
| 关键词 | Aberration measurement Principal component analysis Optimized marks Aerial image |
| 通讯作者 | wang, xz (reprint author), chinese acad sci, shanghai inst opt & fine mech, lab informat opt & optoelect technol, shanghai 201800, peoples r china. |
| 英文摘要 | we propose an aberration measurement technique based on principal component analysis of aerial images of optimized marks (amai-om). zemike aberrations are retrieved using a linear relationship between the aerial image and zemike coefficients. the linear relationship is composed of the principal components (pcs) and regression matrix. a centering process is introduced to compensate position offsets of the measured aerial image. a new test mark is designed in order to improve the centering accuracy and theoretical accuracy of aberration measurement together. the new test marks are composed of three spaces with different widths, and their parameters are optimized by using an accuracy evaluation function. the offsets of the measured aerial image are compensated in the centering process and the adjusted pc coefficients are obtained. then the zernike coefficients are calculated according to these pc coefficients using a least square method. the simulations using the lithography simulators prouth and dr.litho validate the accuracy of our method. compared with the previous aberration measurement technique based on principal component analysis of aerial image (amai-pca), the measurement accuracy of zernike aberrations under the real measurement condition of the aerial image is improved by about 50%. (c) 2014 elsevier b.v. all rights reserved, |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13699]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Yan, Guanyong 2.Wang, Xiangzhao 3.Li, Sikun 4.Yang, Jishuo] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China 5.[Yan, Guanyong 6.Yang, Jishuo] Univ Chinese Acad Sci, Beijing 100049, Peoples |
| 推荐引用方式 GB/T 7714 | Yan, Guanyong,Wang, Xiangzhao,Li, Sikun,et al. Aberration measurement based on principal component analysis of aerial images of optimized marks[J]. opt. commun.,2014,329:63. |
| APA | Yan, Guanyong,Wang, Xiangzhao,Li, Sikun,Yang, Jishuo,&Xu, Dongbo.(2014).Aberration measurement based on principal component analysis of aerial images of optimized marks.opt. commun.,329,63. |
| MLA | Yan, Guanyong,et al."Aberration measurement based on principal component analysis of aerial images of optimized marks".opt. commun. 329(2014):63. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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