一种降低平面子孔径拼接累积误差的方法
文献类型：期刊论文
| 作者 | 李永; 唐锋; 卢云君; 王向朝; 郭福东; 李杰; 吴飞斌 |
| 刊名 | 中国激光
 |
| 出版日期 | 2015 |
| 卷号 | 42期号:7页码:708006 |
| 其他题名 | A Method for Reducing the Error Accumulation in Sub-Aperture Stitching Interferometer for Flat Optics |
| 通讯作者 | Li Yong, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Tang Feng, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Lu Yunjun, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Wang Xiangzhao, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Guo Fudong, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Li Jie, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Wu Feibin, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. |
| 中文摘要 | 干涉仪参考镜面形离焦误差难以精确标定,是导致拼接累积效应、制约平面子孔径拼接系统检测精度的主要因素。推导了参考镜离焦与拼接累积误差、拼接次数间的定量表达式,基于该表达式在拼接过程中标定并去除参考镜离焦误差,降低拼接累积误差。对450 mm*60 mm的平面镜进行了8个子孔径的拼接检测,与大口径干涉仪检测结果比对,去除参考面离焦误差前后拼接测量误差峰谷(PV)值从lambda/10减小至lambda/30,有效提高了拼接测量精度。结合绝对检验技术标定参考镜高阶面形误差,验证了离焦是引起拼接误差累积的主要因素,消除参考镜高阶面形误差并不能显著提高拼接检测精度。 |
| 英文摘要 | The power of reference flat (RF) in interferometer is difficult to be calibrated accurately. It leads to stitching error accumulation effect in sub-aperture stitching interferometer for flat optics, and becomes the major restriction factor for improving stitching accuracy. A quantitative equation is deduced for calculating the power of RF from stitching accumulation error and stitching numbers. Then the power of RF is calibrated and removed in the process of stitching. The error Accumulation is reduced. A flat mirror with aperture of 450 mm*60 mm is tested by 8 sub- apertures. Compared with the test result of a large aperture interferometer, the stitching measurement error is reduced from lambda/10 peak-valley value to lambda/30 PV with power compensation. The stitching test accuracy is improved effectively. Using absolute flatness test, the high order surface figure of the RF is also calibrated. It is verified that the power is the main source of the error accumulation in stitching. Removing the high order surface figure of the RF cannot improve the stitching accuracy significantly. |
| 收录类别 | EI |
| 原文出处 | http://www.opticsjournal.net |
| 语种 | 中文 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/14177]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.李永, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 2.唐锋, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 3.卢云君, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 4.王向朝, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 5.郭福东, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 6.李杰, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 7.吴飞斌, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. |
| 推荐引用方式 GB/T 7714 | 李永,唐锋,卢云君,等. 一种降低平面子孔径拼接累积误差的方法[J]. 中国激光,2015,42(7):708006. |
| APA | 李永.,唐锋.,卢云君.,王向朝.,郭福东.,...&吴飞斌.(2015).一种降低平面子孔径拼接累积误差的方法.中国激光,42(7),708006. |
| MLA | 李永,et al."一种降低平面子孔径拼接累积误差的方法".中国激光 42.7(2015):708006. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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