Large-area three-dimensional profilometer based on digital micromirror device
文献类型：期刊论文
| 作者 | Zhang, Yunbo; Zeng, Aijun; Huang, Huijie; Hou, Wenmei |
| 刊名 | j. opt. technol.
 |
| 出版日期 | 2015 |
| 卷号 | 82期号:2页码:102 |
| 通讯作者 | zhang, yb (reprint author), chinese acad sci, shanghai inst opt & fine mech, shanghai 201800, peoples r china. |
| 英文摘要 | the single pinhole scanning confocal microscope is suffering from scanning speed. this paper studies a large-area profilometer with multiple virtual pinholes. a digital micromirror device comprised of millions of micromirrors generates multiple virtual pinholes which are utilized for parallel scanning. the key parameters affecting the measurement can be configured conveniently by the digital micromirror device controller. the working principles of a digital micromirror device base confocal microscope have been analyzed and a setup has been built up. tomographic images are acquired and the depth response curves are extracted. a structured silicon sample is measured and three-dimensional results have been reconstructed. the system repeatability is better than 60 nm. (c) 2015 optical society of america. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/14196]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Zhang, Yunbo 2.Zeng, Aijun 3.Huang, Huijie] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 4.[Zeng, Aijun 5.Huang, Huijie] Univ Chinese Acad Sci, Beijing, Peoples R China 6.[Hou, Wenmei] Univ Shanghai Sci & Technol, Dept Opt Elect & Comp Engn, Shanghai, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Yunbo,Zeng, Aijun,Huang, Huijie,et al. Large-area three-dimensional profilometer based on digital micromirror device[J]. j. opt. technol.,2015,82(2):102. |
| APA | Zhang, Yunbo,Zeng, Aijun,Huang, Huijie,&Hou, Wenmei.(2015).Large-area three-dimensional profilometer based on digital micromirror device.j. opt. technol.,82(2),102. |
| MLA | Zhang, Yunbo,et al."Large-area three-dimensional profilometer based on digital micromirror device".j. opt. technol. 82.2(2015):102. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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