Linearity estimation of high accurate energy detector for excimer laser
文献类型：期刊论文
| 作者 | Xie, Chengke; Chen, Ming; Zhu, Jing; Yang, Baoxi; Huang, Huijie |
| 刊名 | optik
 |
| 出版日期 | 2015 |
| 卷号 | 126期号:7_8页码:817 |
| 通讯作者 | huang, hj (reprint author), chinese acad sci, shanghai inst opt & fine mech, shanghai 201800, peoples r china. |
| 英文摘要 | high accurate pulse energy detection for excimer laser is one of the most important technologies in deep ultra violet (duv) lithography machine for precise dose control. in order to estimate the linearity of the siom proprietary energy detector (ed), a modified correlation method and the corresponding system have been developed. in the proposed method, an identical home-made ed was used as reference in the experimental system showing benefit as pulse energy fluctuation elimination. secondly, this method provides a solution of high accurate measurement with a reference detector which is the same as the tested detector. the linearity estimation system contains an excimer laser, a beam expander, an adjustable diaphragm, a beam splitter, a reference ed (r-ed), a set of attenuators and a tested ed (t-ed). experimental results show that, with linear least-squares fitting, the measured nonlinearity factor of the ed is 0.617% in a dynamic range of about 1-10 nj per pulse, and the combined uncertainty is 1.140%. it is proved that the siom proprietary ed can be used in high accurate pulse energy measurement of excimer lasers. (c) 2015 elsevier gmbh. all rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/14217]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Xie, Chengke 2.Chen, Ming 3.Zhu, Jing 4.Yang, Baoxi 5.Huang, Huijie] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 6.[Xie, Chengke 7.Chen, Ming 8.Zhu, Jing 9.Yang, Baoxi 10.Huang, Huijie] Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xie, Chengke,Chen, Ming,Zhu, Jing,et al. Linearity estimation of high accurate energy detector for excimer laser[J]. optik,2015,126(7_8):817. |
| APA | Xie, Chengke,Chen, Ming,Zhu, Jing,Yang, Baoxi,&Huang, Huijie.(2015).Linearity estimation of high accurate energy detector for excimer laser.optik,126(7_8),817. |
| MLA | Xie, Chengke,et al."Linearity estimation of high accurate energy detector for excimer laser".optik 126.7_8(2015):817. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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