Adaptive denoising method to improve aberration measurement performance
文献类型：期刊论文
| 作者 | Yang, Jishuo; Wang, Xiangzhao; Li, Sikun; Duan, Lifeng; Bourov, Anatoly Y.; Erdmann, Andreas |
| 刊名 | opt. commun.
 |
| 出版日期 | 2013 |
| 卷号 | 308页码:228 |
| 通讯作者 | wang, xz (reprint author), chinese acad sci, shanghai inst opt & fine mech, lab informat opt & optoelect technol, 390 qinghe rd, shanghai 201800, peoples r china. |
| 英文摘要 | an adaptive denoising method utilizing weighted least-square (wlsq) is proposed for an aberration measurement (am) method based on aerial images (ai). in the aberration measurement process, the wlsq method is employed to obtain the principal component coefficients which are used for extracting the zernike coefficients. in this paper, we also provide a noise model according to the actual aerial images. based on this noise model, a simplified weighting factor for the wlsq method is also proposed. because of the adaptive and lossless denoising ability of the proposed method, more accurate zernike coefficients can be extracted from aerial images. compared with the aberration measurement techniques based on principal component analysis of aerial images (amai-pca), the proposed method can enhance the accuracy by more than 30% when the range of zernike aberrations is within 0.1 lambda. the experiment also shows that the proposed method can detect the aberration shift more accurately. (c) 2013 elsevier b.v. all rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/14725]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Yang, Jishuo 2.Wang, Xiangzhao 3.Li, Sikun] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China 4.[Yang, Jishuo 5.Wang, Xiangzhao] Univ Chinese Acad Sci, Beijing 100049, Peoples R China 6.[Duan, Lifeng 7.Bourov, Anatoly Y.] Shanghai Microelect Equipment Co, Shanghai 201203, Peoples R China 8.[Erdmann, Andreas] Fraunhofer Inst Integrated Syst & Device Technol, D-91058 Erlangen, Germany |
| 推荐引用方式 GB/T 7714 | Yang, Jishuo,Wang, Xiangzhao,Li, Sikun,et al. Adaptive denoising method to improve aberration measurement performance[J]. opt. commun.,2013,308:228. |
| APA | Yang, Jishuo,Wang, Xiangzhao,Li, Sikun,Duan, Lifeng,Bourov, Anatoly Y.,&Erdmann, Andreas.(2013).Adaptive denoising method to improve aberration measurement performance.opt. commun.,308,228. |
| MLA | Yang, Jishuo,et al."Adaptive denoising method to improve aberration measurement performance".opt. commun. 308(2013):228. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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