Grating imaging scanning lithography
文献类型：期刊论文
| 作者 | Yu, Bin; Zhou, Changhe; Cao, Hongchao; Sun, Wenting |
| 刊名 | chin. opt. lett.
 |
| 出版日期 | 2013 |
| 卷号 | 11期号:8页码:80501 |
| 通讯作者 | zhou, ch (reprint author), chinese acad sci, shanghai inst opt & fine mech, informat opt lab, shanghai 201800, peoples r china. |
| 英文摘要 | we present a grating imaging scanning lithography system for the fabrication of large-sized gratings. in this technology, +/- 1-order diffractive beams are generated by a phase grating and selected by a spatial filter. meanwhile, a 4f system enables the +/- 1-order diffractive beams to form a grating image with a clear jagged-edge boundary on the substrate. a high-precision two-dimensional (2d) mobile stage is used for complementary cyclical scanning, thereby effectively eliminating image stitching errors. the absence of such errors results in a seamless and uniform large-sized grating. characterized by a simple structure, high energy use, and good stability, this lithography system is highly relevant to the high-speed and cost-effective production of large-sized gratings. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/14961]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Yu, Bin 2.Zhou, Changhe 3.Cao, Hongchao 4.Sun, Wenting] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Informat Opt Lab, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, Bin,Zhou, Changhe,Cao, Hongchao,et al. Grating imaging scanning lithography[J]. chin. opt. lett.,2013,11(8):80501. |
| APA | Yu, Bin,Zhou, Changhe,Cao, Hongchao,&Sun, Wenting.(2013).Grating imaging scanning lithography.chin. opt. lett.,11(8),80501. |
| MLA | Yu, Bin,et al."Grating imaging scanning lithography".chin. opt. lett. 11.8(2013):80501. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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