High Divergent 2D-Grating
文献类型：会议论文
| 作者 | Wang, Jin; Ma, Jianyong; Zhou, Changhe |
| 出版日期 | 2014 |
| 会议名称 | conference on holography, diffractive optics, and applications vi |
| 通讯作者 | wang, j (reprint author), chinese acad sci, shanghai inst opt & fine mech, 390 qinghe rd, shanghai 201800, peoples r china. |
| 英文摘要 | a 3x3 high divergent 2d-grating with period of 3.842 mu m at wavelength of 850nm under normal incidence is designed and fabricated in this paper. this high divergent 2d-grating is designed by the vector theory. the rigorous coupled wave analysis (rcwa) in association with the simulated annealing (sa) is adopted to calculate and optimize this 2d-grating. the properties of this grating are also investigated by the rcwa. the diffraction angles are more than 10 degrees in the whole wavelength band, which are bigger than the traditional 2d-grating. in addition, the small period of grating increases the difficulties of fabrication. so we fabricate the 2d-gratings by direct laser writing (dlw) instead of traditional manufacturing method. then the method of icp etching is used to obtain the high divergent 2d-grating. |
| 收录类别 | CPCI |
| 会议录 | holography, diffractive optics, and applications vi
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17227]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Wang, Jin 2.Ma, Jianyong 3.Zhou, Changhe] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Jin,Ma, Jianyong,Zhou, Changhe. High Divergent 2D-Grating[C]. 见:conference on holography, diffractive optics, and applications vi. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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