Pitch Evaluation of High-precision Gratings
文献类型：会议论文
| 作者 | Lu, Yancong; Zhou, Changhe; Wei, Chunlong; Jia, Wei; Xiang, Xiansong; Li, Yanyang; Yu, Junjie; Li, Shubin; Wang, Jin; Liu, Kun |
| 出版日期 | 2014 |
| 会议名称 | conference on holography, diffractive optics, and applications vi |
| 通讯作者 | lu, yc (reprint author), chinese acad sci, shanghai inst opt & fine mech, 390 qinghe rd, shanghai 201800, peoples r china. |
| 英文摘要 | optical encoders and laser interferometers are two primary solutions in nanometer metrology. as the precision of encoders depends on the uniformity of grating pitches, it is essential to evaluate pitches accurately. we use a ccd image sensor to acquire grating image for evaluating the pitches with high precision. digital image correlation technique is applied to filter out the noises. we propose three methods for determining the pitches of grating with peak positions of correlation coefficients. numerical simulation indicated the average of pitch deviations from the true pitch and the pitch variations are less than 0.02 pixel and 0.1 pixel for these three methods when the ideal grating image is added with salt and pepper noise, speckle noise, and gaussian noise. experimental results demonstrated that our method can measure the pitch of the grating accurately, for example, our home-made grating with 20 mu m period has 475nm peak-to-valley uniformity with 40nm standard deviation during 35mm range. another measurement illustrated that our home- made grating has 40nm peak-to-valley uniformity with 10nm standard deviation. this work verified that our lab can fabricate high-accuracy gratings which should be interesting for practical application in optical encoders. |
| 收录类别 | CPCI |
| 会议录 | holography, diffractive optics, and applications vi
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17228]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Lu, Yancong 2.Zhou, Changhe 3.Wei, Chunlong 4.Jia, Wei 5.Xiang, Xiansong 6.Li, Yanyang 7.Yu, Junjie 8.Li, Shubin 9.Wang, Jin 10.Liu, Kun |
| 推荐引用方式 GB/T 7714 | Lu, Yancong,Zhou, Changhe,Wei, Chunlong,et al. Pitch Evaluation of High-precision Gratings[C]. 见:conference on holography, diffractive optics, and applications vi. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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