Source Optimization using Particle Swarm Optimization Algorithm in Photolithography
文献类型：会议论文
| 作者 | Wang, Lei; Li, Sikun; Wang, Xiangzhao; Yan, Guanyong; Yang, Chaoxing |
| 出版日期 | 2015 |
| 会议名称 | conference on optical microlithography xxviii |
| 通讯作者 | wang, l (reprint author), chinese acad sci, shanghai inst opt & fine mech, lab informat opt & optoelect technol, shanghai 201800, peoples r china. |
| 英文摘要 | in recent years, with the availability of freeform sources, source optimization has emerged as one of the key techniques for achieving higher resolution without increasing the complexity of mask design. in this paper, an efficient source optimization approach using particle swarm optimization algorithm is proposed. the sources are represented by pixels and encoded into particles. the pattern fidelity is adopted as the fitness function to evaluate these particles. the source optimization approach is implemented by updating the velocities and positions of these particles. the approach is demonstrated by using two typical mask patterns, including a periodic array of contact holes and a vertical line/ space design. the pattern errors are reduced by 66.1% and 39.3% respectively. compared with the source optimization approach using genetic algorithm, the proposed approach leads to faster convergence while improving the image quality at the same time. the robustness of the proposed approach to initial sources is also verified. |
| 收录类别 | CPCI |
| 会议录 | optical microlithography xxviii
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17234]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.[Wang, Lei] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Lei,Li, Sikun,Wang, Xiangzhao,et al. Source Optimization using Particle Swarm Optimization Algorithm in Photolithography[C]. 见:conference on optical microlithography xxviii. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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