真空环境中光学薄膜的激光损伤研究
文献类型：学位论文
| 作者 | 崔云 |
| 学位类别 | 博士 |
| 答辩日期 | 2008 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 邵建达 |
| 关键词 | 光学薄膜 激光损伤 真空 有机污染物 温度 激光预处理 |
| 其他题名 | Laser-induced damage of optical coatings in vacuum |
| 中文摘要 | 随着激光系统越来越广泛地应用于空间领域，将有更多的激光系统工作在特殊的真空环境中。相比于大气环境，复杂的真空环境具有其特殊性。为此，本论文将模拟高真空环境，开展光学薄膜真空损伤实验研究。 首先设计、搭建了真空损伤实验系统，模拟高真空环境，为在真空环境下进行光学薄膜激光损伤研究提供了实验平台。 然后利用真空损伤实验系统研究了真空环境中光学薄膜的激光损伤性能。结果表明：真空环境本身对光学薄膜抗激光损伤性能并没有显著的影响；但是在真空环境中，挥发释放出来的有机污染物凝结在光学元件表面将会导致薄膜的激光损伤阈值下降。当真空中存在有机污染物时，真空中充入的特殊气体会减弱有机污染物对光学元件激光损伤的影响；充氮气时的阈值要高于充氧气时的阈值，充氧气时的阈值高于不充保护气体的阈值。在清洁无有机污染物的真空环境中充入氧气和氮气对光学薄膜的激光损伤阈值均没有明显影响。在真空环境中使用双束离子束溅射工艺制备的减反射膜比电子束蒸镀工艺制备的薄膜具有更好的抗多脉冲激光损伤性能。 理论计算分析了环境温度对光学薄膜光谱性能、薄膜应力的影响。结果表明：随着温度环境升高，光学薄膜的光谱性能变化较小，薄膜的热应力有明显的升高。通过实验研究了大气环境和真空环境中温度对光学薄膜抗激光损伤性能的影响。实验表明：大气环境中，随着温度的升高，激光损伤阈值有明显的升高。分析认为温度的升高可以阻止热熔融或热力耦合导致薄膜损伤，从而提高大气环境中光学薄膜抗激光损伤性能。实验显示真空中光学薄膜的激光损伤阈值随着温度的升高并没有明显的变化。 另外研究了真空环境中的激光预处理工艺对光学薄膜抗激光损伤性能的影响。真空中激光预处理工艺能够抑制缺陷的发展，降低薄膜的吸收，提高光学薄膜抗激光损伤性能。 |
| 英文摘要 | At present, laser systems are widely applied in the field of space. There are more laser systems working in vacuum. The vacuum circumstance is complicated compared with atmosphere. In this thesis, we investigated the laser resistance capability of optical coatings in vacuum. A vacuum laser-induced damage experiment system (VLDES) was designed and constructed. It could simulate the high vacuum circumstance and provided the experiment platform to study the laser-induced damage of the optical coatings in vacuum. The influence on the laser-induced damage threshold (LIDT) of coatings in vacuum was studied by using the VLDES. The results indicated that the nature of vacuum did not influence the laser resistance capability of optical coatings, but the organic contamination volatilized by the materials in vacuum was adsorbed to optical surfaces to make the LIDT decrease. O2 and N2 were transferred to the vacuum with organic contamination or without organic contamination respectively. The results showed that when there was organic contamination in vacuum, the gas transferred could weaken the influence of organic contamination to LIDT of coatings, the LIDT of coatings in vacuum with N2 was greater than that in vacuum with O2, the LIDT in vacuum with O2 was greater than that in vacuum without the protective gas. The dependence of multiple pulse laser irradiations on coatings was investigated in air and in vacuum respectively. The optical coatings were deposited with different technologies. The result showed that under the condition of multi-shot laser irradiation the decrease of LIDT of antireflection coatings deposited with double ion beam sputtering was smaller than that deposited with electron beam evaporation. In this thesis, the influence of temperature on the spectrum and thermal stress to coatings were analyzed theoretically. The results indicated that the spectrum had little change, and the thermal stress increased with the temperature increasing. The influence of temperature on the capability of laser resistance of coatings in atmosphere and vacuum were investigated in experiments. The results indicated that the LIDT increased with the temperature increasing in air, because the increment of temperature could prevent the thermal melting and thermal mechanical coupling damage. As there wasn’t conduction of heated gas in vacuum, the LIDT of optical coatings in vacuum was similar to it in air when the temperature was increased. The influence of laser conditioning to laser damage resistance was investigated in vacuum. It was found that the laser conditioning could decrease the absorption and improve the laser resistance capability of optical coatings in vacuum. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15211]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 崔云. 真空环境中光学薄膜的激光损伤研究[D]. 中国科学院上海光学精密机械研究所. 2008. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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