电光陶瓷和微机械光束导向技术的研究
文献类型：学位论文
| 作者 | 董作人 |
| 学位类别 | 博士 |
| 答辩日期 | 2009 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 方祖捷 |
| 关键词 | PLZT 光学相控阵 MEMS 光开关 CCD FPGA |
| 其他题名 | Stydy on beam steering technologies using electro-optical ceramic and Micro-Electro-Mechanical Systems(MEMS) |
| 中文摘要 | 光束导向技术是光学和光学工程系统中的一个重要的组成部分，也是光学技术发展前沿，特别是在开拓空间应用、军事应用和光学信息技术领域中的关键技术。本文主要开展了基于透明电光陶瓷材料掺镧锆钛酸铅（Lead Lanthanum Zirco nate Titanate，PLZT）的光学相控阵技术和基于微机电系统（Micro-Electro-Mecha nical Systems，MEMS）的光开关阵列器件技术的研究。 光学相控阵是一种新型的光束导向技术，具有快速、无惯性和可任意指向等特点，在光电对抗、激光雷达和自由空间激光通信等领域中有着广泛的应用前景。PLZT透明电光陶瓷是制作光学相控阵的优良材料，其具有响应速度快、电光系数高和透光性好等优点。本论文首先详细介绍了PLZT的电学、光学特性及其测试方法和测试结果，并运用傅立叶分析方法，在空间频域上对光学相控阵能够实现光束偏转的理论进行了分析。然后对基于PLZT电光陶瓷的光束导向技术进行了基础性实验研究，其主要工作如下： 利用PLZT的幅度调制特性，设计并制作了一种棱镜型光束偏转器，建立了相应的光束偏转测试平台，并研究了温度特性对偏转器性能的影响，在实验上，验证了PLZT的二次电光效应，获得了温度升高使PLZT的特性发生明显的改变的结果。 提出了一种具有上下表面电极结构的光学相控阵技术，理论分析表明，这种结构可以有效的降低器件工作电压。在实验上，制作了采用PLZT电光陶瓷的由8个相控单元组成的相控阵器件，建立了相应的测试平台，演示了该相控阵的光束偏转效果。 微机电系统采用集成工艺技术，可将机械、电子及其它功能元件制作在微芯片上，是微机械、微电子技术的融合，它的出现为光束导向技术向微小型化、大阵列化和低成本化方向发展提供了可能性。本文系统阐述了采用MEMS技术制造微电磁执行器的加工工艺，描述了微电磁执行器具有体积小、重复性高和自锁能力的特点，介绍了在本文研究开发的光开关阵列中，利用微电磁执行器作为驱动双面反射镜的执行机构，实现光路切换的工作原理。 提出了一种可实现Benes网络交换的4x4光开关光路结构，设计了基于微电磁执行器和双面反射镜的2x2和4x4微机械光开关，其中4x4光开关具有结构紧凑，运动部件少的特点。介绍了使用2x2和4x4光开关级联扩展构建8x8和16x16微机械光开关阵列的设计思想，并分析验证了这种光开关阵列的无阻塞特性。 设计了微电磁执行器和光纤准直器的固定装置，建立了光开关阵列的装配平台和测试控制计算机软件平台，制备了2x2、4x4、8x8和16x16微机械光开关，性能测试表明该系列微机械光开关具有损耗低，开关速度快，优良的串扰和回波损耗特性等特点，并且具有自锁能力。 在光电捕获、跟踪和瞄准系统中，面阵电荷耦合器件（Charge Coupled Device，CCD）是常用的空间光束位置探测器件，但其较低的采样频率限制了CCD在快速光电跟踪系统中的应用。本文分析了采样频率对系统带宽的限制作用，针对TC237型CCD，介绍了读取CCD子窗口可提高CCD帧速率的概念，分析了探测光斑的大小和位置对提高CCD帧速率的影响，设计了可实现只读取子窗口的图像采集时序，开发了以现场可编程门阵列（Field Programmable Gate Array， FPGA）器件为核心的CCD子窗口图像采集系统，最后给出了CCD子窗口图像。 |
| 英文摘要 | Laser beam steering is an important part in the optics and optical engineers, and is a key technology for optical space applications、military applications and optical information. Optical Phased Arrays using PLZT and Optical Switch Arrays using MEMS were presented in this dissertation. Optical Phased Arrays(OPA) can provide a novel means for fast, inertialess and random-access beam steering. Wide potential applications of OPA are expected in Electro-optic Countermeasure, Laser Radar and Free Space Optical communication. Lead lanthanum zirconate titanate(PLZT) ,a transparent electro-optic ceramic with fast switching, electro-optic effect and good optical transparen cy, is one of main materials for manufacturing OPA. This dissertation introduced the electronic and optical properties of PLZT ,their tested method and results at first. Spatial frequency analysis of bea m steering capabilities of OPA was studied by using Fourier Transform. Fundament al and experim ental development of beam steerin g technologies based on PLZT were presented in this dissertat ion. The main research contents include: A prism-like beam deflector using the amplitude modulator feature of PLZT was designed and fabricated. Testing platform was established to test beam steering angle. The experimental pheno mena of the degradation of PLZT properties with increasing temperature was observed, and the quadratic electro-optic effect of PLZT was verified. Up-down surface electrode structure for OPA was proposed, which was favorable to decrease the half-wave voltage of PLZT. A set of 8-channel optical phased arrays was designed and fabricat ed using up-down surface electrodes on PLZT and used to experimentally demonstrate the beam steering performance. MEMS are manufactured by the integrated process technique that can fabricate the mechanical, electronic and other functional components on the micro-chip. Bea m steering technologies that could be developed towards compact, huge arrays and low-cost are enabled with the development of MEMS. The MEMS processing of electromagnetic micro-actuator with the feature of small volume, high repeatability and self-latch ability was introduced in this dissertation. For 4x4 optical switch arrays, A optical path structure that can realize the Benes connect-net was presented in this dissertation. Operation principle of 2x2 and 4x4 optical switches based on micro electro-magnetism actuators and two-facet mirrors were designed. The structure of NxN optical switch arrays consisting of the 2x2 and 4x4 optical switch arrays were introduced. 4x4 optical switch arrays was characterize d as much less moveable components, low insertion loss and compact. The rearrange able non-blocking feature of 4x4,8x8,16x16 optical switch arrays and their routing algorithm were analyzed. The mounting device for micro electro-magnetism actuator and fiber collimator was designed. Assemble platform for optic switch arrays was established. Computer debug and control software of testing optical switch arrays were programmed. 2x2、4x4、8x8 and 16x16 optical switch arrays were fabricated; these devices were measured with good performances on insertion loss , return loss, crosstalk , switch speed, latch ability, and so on. Charged Coupled Device (CCD) is used generally to detect beam position in Acquisition, trackin g and pointing systems. Disadvantage of Low frame frequency influe nces the applications of CCD in fast optic-electro track system. In this dissertation, the effection of sample frequency to system bandwidth was analyzed. The concept of random readout CCD sub-window technology was introduce d, the effection of the position and size variation of spot on CCD to the sampling frequency was analyzed; Image sample timing for only readout sub-window was designed, the high-frame frequency sub-window image acquisition system based on FPGA was developed. Sub-window image was captured. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15253]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 董作人. 电光陶瓷和微机械光束导向技术的研究[D]. 中国科学院上海光学精密机械研究所. 2009. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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