基于多层膜结构的超分辨光及磁光记录研究
文献类型：学位论文
| 作者 | 焦新兵 |
| 学位类别 | 博士 |
| 答辩日期 | 2009 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 干福熹 |
| 关键词 | 蓝光超分辨记录 光存储 磁光存储 颗粒膜 热扩散系数 |
| 其他题名 | Study on the super-resolution optical and magneto-optical recording with multilayer films structure |
| 中文摘要 | 随着信息技术的迅速发展，对信息存储容量的要求越来越高。减小记录点或记录磁畴的关键是减小薄膜的加热区域。光存储及磁光存储受到光学衍射极限的限制，因此突破其限制具有重要意义。论文首先综述了光及磁光存储发展历程及超分辨技术，然后介绍了磁光存储材料及记录原理，指出了存在的不足之处，提出了本文的主要研究内容。 本论文主要包括以下几个方面的工作：相变材料AgInSbTe的热学性能研究；相变薄膜AgInSbTe亚衍射极限红光和蓝光记录性能研究。Sb孔径型掩膜超分辨磁光记录性能研究；Si掩膜超分辨磁光记录性能研究；导热层超分辨磁光记录性能研究；对磁光存储记录介质进行了探索，制备了颗粒膜TbFeCo-SiO2、TbFeCo-MgO并对其磁性能进行研究；为了增大读出性能，制备了双层耦合膜。 研究了相变材料AgInSbTe热学性能。采用差示扫描量热仪及热重分析仪研究了晶态和非晶态AgInSbTe的比热和热重。采用激光导热仪研究了晶态和非晶态AgInSbTe的面内热扩散系数。结果表明晶态AgInSbTe的热扩散系数随着温度的升高降低；而非晶态AgInSbTe的热扩散系数随着温度升高基本不变。 研究了相变材料AgInSbTe记录性能。研究了AgInSbTe红光记录性能。研究了不同导热层对AgInSbTe红光记录性能的影响。研究了热处理对Glass/AgInSbTe及Glass/Si/AgInSbTe红光记录性能的影响。最后研究了相变材料的蓝光记录性能，定性计算热量扩散的方向，结果表明蓝光记录“Glass/Si/AgInSbTe”样品能够实现70nm的记录点。 研究了超分辨磁光记录性能。采用Super-RENS静态记录实验方法研究Sb孔径型掩膜超分辨磁光记录性能。磁控溅射法制备了“Glass/SiN/Sb/SiN/TbFeCo/SiN”样品，研究了其磁光记录性能，通过对Sb孔径型掩膜材料的研究为发现新型掩膜材料作准备。采用磁控溅射法制备了磁光存储样品“Glass/SiN/Si/SiN/TbFeCo/SiN”，其中Si薄膜作为超分辨掩膜。研究了激光脉宽、功率对磁畴的影响；理论计算了薄膜的温度场分布，Si掩膜增大了温度场梯度，通过记录性能的研究，实现了小于光学衍射极限100nm磁畴的记录和磁力显微镜的观察。 研究了导热层超分辨磁光记录性能。采用Super-RENS静态记录的实验方法研究其磁光超分辨性能。磁控溅射法制备“Glass/Si/TbFeCo/SiN”、“Glass/Al/TbFeCo/SiN”样品。实验结果表明与记录层TbFeCo薄膜热扩散系数相差较大的Si、Al薄膜能够迅速扩散来自记录层的热量，从而改变材料的温度场分布，具有缩小有效加热光斑区域的作用，实现了小于光学衍射极限磁畴的记录。 对磁光存储记录介质进行探索。为了有效降低记录介质颗粒之间的交换耦合，提高介质矫顽力，本文采用共溅法制备了颗粒膜“TbFeCo-SiO2、TbFeCo-MgO”。研究了厚度对颗粒膜垂直矫顽力的影响，厚度为75nm的TbFeCo-SiO2颗粒膜矫顽力最大。制备厚度为75nm的颗粒膜TbFeCo-MgO。结果证明采用非磁氧化物减弱了亚铁磁材料的磁耦合，提高了介质的矫顽力。为了提高读出特性，直流磁控溅射法制备了双层耦合膜“Glass/TbFeCo/GdTbFeCo”，其中TbFeCo薄膜作为记录层，GdTbFeCo薄膜作为读出层。 |
| 英文摘要 | The rapid development of information technology requires the higher information-storage capacity. The direct technology is to diminish the recording marks, key part of which is to diminish the heating area of the film. Thus, breaking the optical diffraction limit makes great sense to the optical storage and magneto-optical storage. In this paper, the development story of optical and magneto-optical storage and the super-resolution technology are reviewed firstly; the mechanism and materials of magneto-optical recording are introduced secondly, simultaneously the deficiencies of the above discussed technologies are pointed out; finally the main contents of this paper are proposed and discussed. This paper mainly includes the following parts: the thermal properties of AgInSbTe phase change materials; the sub-diffraction-limit recording properties of AgInSbTe phase change materials using red and blue lasers. The magneto-optical recording properties of Sb-type super-resolution mask film; the magneto-optical recording of Si super-resolution mask film; the magneto-optical recording of heat-conducting technology; exploration of magneto-optical recording media; preparation of TbFeCo-SiO2 and TbFeCo-MgO granular films, and their magnetic properties; preparation of exchange coupled double layers for improving readout characteristics. The thermal properties of phase change materials AgInSbTe were studied. The heat-capacity and thermo-gravimetric of crystalline and amorphous AgInSbTe materials were studied by Differential scanning calorimeter and Thermo-gravimetric analyzer, respectively. The thermal diffusivity in plane of crystalline and amorphous AgInSbTe materials was studied by Laser flash apparatus. The results indicated that the thermal diffusivity in plane of crystalline AgInSbTe decreased when the temperature increased, while the thermal diffusivity in plane of amorphous AgInSbTe basically changed little. The recording properties of AgInSbTe phase change materials were studied. The recording properties of AgInSbTe films and the effects of different thermal-conducting layers to AgInSbTe films were studied using red laser. The effect of heat treatment on AgInSbTe and Sub/Si/AgInSbTe recording properties were studied. At last, the recording properties of phase change materials were studied using blue laser, the directions of thermal diffusion were calculated qualitatively. The results indicated that recording marks with a size of 70nm were realized through Glass/Si/AgInSbTe sample using blue laser recording. The super-resolution magneto-optical recording properties were studied. The static magneto-optical recording properties of Sb-type super-resolution structure were studied. The samples of "Glass/SiN/Sb/SiN/TbFeCo/SiN" were prepared by magnetron sputtering method, the magneto-optical recording properties were studied, and study of the Sb-type super-resolution mask film is to look for new mask materials. The magneto-optical recording sample of "Glass/SiN/Si/SiN/TbFeCo/ SiN" was prepared by magnetron sputtering method, and the Si film were used as super-resolution mask film. The effects of laser pulse and power on magnetic domain were studied, the temperature distribution was theoretically calculated, and the temperature gradient was increased by Si mask film. The magnetic domains with a size of 100 nm magnetic domain which is much smaller than optical diffraction limit were realized though Magnetic Force Microscopy(MFM). Properties of super-resolution magneto-optical structure with thermal-conducting layers were studied by static recording method. The of "Glass/Si/TbFeCo/SiN" and "Glass/Al/TbFeCo/SiN" samples were prepared by magnetron sputtering method. The heat can be rapidly diffused through Si, Al films which had much higher thermal diffusion than TbFeCo recording layer, accordingly the temperature distribution of the materials can be changed, and the effective area of laser spot was reduced, the magnetic domain which was smaller than optical diffraction limit were realized. We explored recording media for magneto-optical recording, In order to decrease the exchange coupling among grains and increase the coercivity, we prepared granular films such as TbFeCo-SiO2 and TbFeCo-MgO through co-sputtering method. We study the coercivity of TbFeCo-SiO2 granular thin film with different thickness, and the coercivity is the largest when the thickness of granular film is 75nm. We also prepared granular film TbFeCo-MgO with a thickness of 75nm. The result indicated that the non-magnetic oxides decreased the exchange coupling of ferrous magnetic materials, increased the magnetic coevercity. In order to increase the readout characteristics, exchange coupled double layer films of TbFeCo/GdTbFeCo were prepared by direct current magnetron sputtering method, while the TbFeCo film was used as recording layer and GdTbFeCo film was used as readout layer. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15263]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 焦新兵. 基于多层膜结构的超分辨光及磁光记录研究[D]. 中国科学院上海光学精密机械研究所. 2009. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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