基于共振效应的亚波长光学及其应用研究
文献类型：学位论文
| 作者 | 麻健勇 |
| 学位类别 | 博士 |
| 答辩日期 | 2009 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 邵建达 |
| 关键词 | 导模共振 多通道效应 表面等离子体共振 全息光刻 |
| 其他题名 | Characteristics and applications of subwavelength optics based on optical resonance |
| 中文摘要 | 导模共振效应是波导所支持的导模（泄漏模）受到光栅衍射级次的激发，引起衍射光能量的重新分配，使光场相对于入射角或波长等物理量的微小变化而出现突变。基于导模共振效应的光学元件，是一种新型的衍射光学元件，具有衍射效率高、共振波长和带宽可控以及在宽光谱范围极低反射率等优良特性。利用它的这些特性，可以制成高反射、高透射、窄带滤波、偏振分离、波长选择等光学器件，在光通信，强激光、生物医学等领域有广阔的应用前景。 本文系统的进行了导模共振光学器件的光学、制备和应用等方面的研究。采用等效介质理论并结合多层平面波导理论详细地讨论了抗反射设计在导模共振滤波器件中的应用；针对传统方法不能同时设计共振峰位置和带宽的弊端，提出了基于递推矩阵极点方程的设计新方法；采用严格的矢量衍射理论对可见光波段浮雕型导模共振光栅进行了结构设计和误差敏感性分析。 采用傅里叶模式理论，对浮雕型和“蝇眼”结构光栅的旁带压缩特性进行了详细的分析；基于金属光栅的表面等离子体共振效应，设计了适用于光通讯波段的透射型滤波器，采用全新的模型，解释了透射增强的物理机制。 详细介绍了全息光刻技术制备导模共振光栅光刻胶掩模的工艺过程，使用实时系统对全息光刻的两个主要工艺步骤—全息曝光与显影过程进行了有效的监测，采用离子束刻蚀工艺，制作了中心波长在1053nm位置附近的Ta2O5导模共振滤波器，光谱测试曲线表明，峰值波长与设计值基本吻合，且峰值透射效率接近20%，这是国内采用Ta2O5波导层得到的透射率的最小值。 |
| 英文摘要 | The Guided-Mode Resonance (GMR) phenomenon in dielectric gratings has attracted great interests for many years. The energy reflected from GMR gratings is redistributed when the leaky modes of resonant gratings are excited by the higher orders of gratings. Hence a relatively sharp peak appears with respect to incident wavelength or angle. The optical elements based on GMR effect can be utilized to produce new devices such as high reflection mirrors, filters, polarization independent and wavelength selection elements, which have potential applications in the fields of lasers, optical communication and biomedicine, can be realized by using the properties of high peak diffraction, low sidebands and controllable line width. The optical properties, preparation method and applications of Guided-Mode Resonant Filter (GMRF) are semantically studied in this dissertation. The sideband reflections of GMRF are effectively reduced through antireflection design based on Effective Medium Theory (EMT) and Multilayer Planar Waveguide method (MPW). A new design method based on theory of propagation matrix pole is proposed for prediction of resonant wavelength and FWHM synchronously. Moreover, the structure and sensitivity of GMRF in the visible wavelength band are designed and analyzed with the Fourier Modal Method (FMM). The side band suppression effect of surface relief and anti-reflection structure surface is analysized through using the theory of FMM. A narrow band transmission filter centered at wavelength of 1053nm is designed by metallic grating with narrow slits at Surface Plasmon (SP) resonance. The physical basis of Extraordinary Optical Transmission (EOT) is explained with our novel model. The fabrication process of lithography mask of GMRF is illustrated in detail. Besides, the interferometric lithography and developing process are monitored by real-time apparatus. The GMRF centered at wavelength of 1053nm is fabricated with using ion beam milling method. It is demonstrated that the transmission at centual wavelength is less 20%, which is minimal value ever be abtained with Ta2O5 film acting as waveguide layer. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15270]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 麻健勇. 基于共振效应的亚波长光学及其应用研究[D]. 中国科学院上海光学精密机械研究所. 2009. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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