一种新型压电步进驱动器理论及试验研究
文献类型：学位论文
| 作者 | 王斌 |
| 学位类别 | 博士 |
| 答辩日期 | 2010 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 压电步进驱动器 柔性铰链 层叠式压电陶瓷 断电箝位 |
| 其他题名 | Theoretical Analysis and Experimental Research on a Novel Piezoelectric Stepper Actuator |
| 中文摘要 | 随着纳米科学和技术的发展，人们研究领域的不断深入，操作对象己从宏/ 微观领域向纵深方向发展。为完成更细微和精密的操作，对运动系统的精度也提 出了更高的要求，在生物医学工程、精密机械、机器人、计算机、自动控制、精 密测量、精密器件微制造、超精密加工等技术领域，对微纳米级的精密定位/驱动 技术的需求日益增多，基于不同原理和结构的精密驱动器的研发越来越受到人们 的普遍关注。 由于压电元件具有体积小、输出力大、频响高、分辨率高等优点，在新型驱 动器家族中，以压电元件为动力转换元件的新式驱动器成为一个重要的分支。压 电步进驱动器是利用压电材料的逆压电效应原理，即在电信号作用下产生力和位 移，并且利用步进仿生运动的原理来实现精密驱动。压电步进驱动器具有精度高、 驱动载荷大、行程大、无磁干扰等诸多优点，因此在现代科技和现代工业技术领 域具有广泛的应用前景。压电步进驱动技术经历了几十年的研究和发展，已经取 得了许多重要的研究成果。本论文尝试在新的驱动原理和结构设计以及驱动控制 方面开展研究工作。 本文设计了一种以层叠式压电陶瓷为驱动元件的新型压电步进驱动器。驱动 器利用杠杆机构实现箝位机构和进给机构交替箝位动子，通过对压电陶瓷小步距 的位移连续累加的步进方式，实现大行程直线位移；具有控制简单，大行程，高 分辨率及断电箝位的特点。样机试验结果表明，驱动器步距分辨率达到50nm， 闭环定位精度小于±5nm，行程21mm。全文内容如下： 1、论述了精密定位的分类及各种压电驱动器发展，特别是压电驱动器大行 程位移实现的原理和特点，在此基础上，确立了以柔性铰链机构为框架，以层叠 式压电陶瓷为动力元件，通过时间放大步进式原理，实现了大行程、高精度的新 型压电驱动器的总体方案，确定了本文的研究内容。 2、对压电陶瓷驱动器的机械特性及电学性能作了详细的分析。推导出压电 步进驱动器结构中柔性铰链的设计计算公式；建立了压电驱动机构的动力学模 型；对于后续机械结构参数的设计、驱动器的选型和使用、运动学分析、驱动电 源的设计有重要的意义。本部分内容是压电步进驱动器设计的理论基础。 3、对本文设计的新型压电步进驱动器的工作原理和机械结构做详细论述， 完成了箝位机构、进给机构、预紧机构和导轨机构的设计和分析。采用有限元分 析软件ANSYS，对箝位机构和进给机构，进行了静、模态特性分析。建立了压电步进驱动器的动力学模型，利用Simulink 软件进行了运动学仿真。 4、完成了压电步进驱动器控制系统的设计，研制了抗干扰、控制方便的压 电陶瓷驱动电源，并初步实现了整个系统的闭环控制。 5、对压电步进驱动器的性能进行了测试，包括进给机构和箝位机构。检测 结果表明，压电步进驱动器步距分辨率达到50nm，闭环定位精度小于±5nm，行 程21mm，静态箝位力10N，动态驱动力为5N；并定性地分析对该驱动器性能影 响的因素并提出了相应的解决办法和措施。 6.对本文的工作做出总结，指出目前研究中尚存在的问题及进一步的工作重点。 |
| 英文摘要 | Along with the development of nano-science and technology, the research area has continued to deepen, having expanded the operation area. For completing of a more subtle and sophisticated operation, the accuracy of the movement system has been put a higher standard, especially in biomedical engineering, precision machining, robotics, computer, automation, precision measurement and precision devices micro-fabrication and ultra-precision processing and so on, the micro/nano-precision positioning/driving technology are also in increasing demand,. The research on the precision actuators that based on the different principles and structures attracts more attention of the people. Because of the advantages of piezoelectric elements, such as small bulk, large generated force, high frequency response, high resolution of displacement and so on, the piezoelectric actuators become an important branch in the family of these novel actuators. The piezoelectric stepper actuator which emulates an inchworm is based on the theory of the inverse piezoelectric effect phenomenon, it is named that the piezoelectric actuator can produces power and displacement under the electric field. The stepper actuator has the good characteristics such as high displacement resolution, heavy load driving, large stroke, and no-magnetism interference,no noise,etc. The piezoelectric stepper actuator will make more use in the modern science and technology and modern industrial realm.With several ten years research on the piezoelectric stepper actuator many progress is get. The dissertation tries to study a novel piezoelectric stepper actuator in the new principle, new structure design and new control methods. The proposed novel piezoelectric stepper actuator was designed based on piezoelectric stack as drive element. Utilizing lever mechanism, moving part are clamped alternatively by clamp mechanism and feed mechanism, and large stroke is created by incrementally summing the relatively small displacements produced by piezoelectric elements. The characteristic features of the system are simple control, large stroke, high resolution and power-off hold . The experiment of the prototype show that, the actuator has a step resolution of 50 nm, close-loop positionning precision of within ±5nm, travel of 21 mm. The main contents of this dissertation are as follows: 1. The classification of precision positioning and the development of kinds of piezoelectric actuation are indicated, especial the characteristic and principle of large stroke in the piezoelectric actuation. Based on the work , A novel piezoelectric stepper actuator summing small steps to achieve large displacements over time is developed, the frame of which is formed by flexure hinge, driven by piezoelectric stack, thus themain purpose of the dissertation is made certain. 2. The mechanical and electrical characteristics of piezoelectric actuator are studied in detail. Flexure hinges are used in the mechanism and design formulas of different mode of hinges are deduced and FEA models are built to validate. The kinetic model of the mechanism driven by Piezoelectric is built. It is significant for structure parameter design, selection and usage for piezoelectric actuator, motion analysis and drive power supply design. These contents are the theory basis of the stepper piezoelectric actuator design. 3. The mechanical structure and the operation principle of proposed piezoelectric stepper actuator is presented in detail. Clamp mechanism, feed mechanism, preload mechanism and guide mechanism are designed. Finite element analysis software ANSY is used to analyze the static and modal characteristics of the clamp mechanism and the feed mechanism. The kinetic model of the stepper actuator is built, and kinetic Simulation is carried out using software simulink. 4. The design of the driving control system of piezoelectric stepper actuator is finished, the PZT power for anti-interference and convenient control is designed. The closed-loop control of the system is achieved. 5. The performance test for the prototype is carried out, including Clamp mechanism and feed mechanism. The experiment shows that the actuator has a step resolution of 50 nm , close-loop positionning precision of within ±5nm, travel of 21 mm, static clamping force of 10N, dynamic driving force of 5N. Additional factors'' impact on the stepper actuator is analyzed qualitative, and the relevant solutions and measures are put forward towards the impact. 6. Main achievements of the dissertation are summarized, some problems in current research are presented, and which should be done in the further now. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15298]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 王斌. 一种新型压电步进驱动器理论及试验研究[D]. 中国科学院上海光学精密机械研究所. 2010. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。