纳米精度微位移干涉测量技术的研究
文献类型：学位论文
| 作者 | 王学锋 |
| 学位类别 | 博士 |
| 答辩日期 | 2000 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 王向朝 |
| 关键词 | 位移测量 干涉仪 半导体激光器 正弦相位调制 |
| 其他题名 | Study on interferometric measurements of displacement with nanometer accuracy |
| 中文摘要 | 该论文从理论上分析了其中存在的问题和缺陷,提出了具体的解决方法,并从理论和实验上验证了这些方法的可行性和实用性.针对注入电流调制半导体激光器(LD)波长时光强度被调制会导致误差,提出了光热波长正弦相位调制干涉仪,大大降低了LD强度调制带来的测量误差;针对用作干涉仪光源的LD波长随温度和电流漂移、干涉仪光学元件振动以及两干涉臂空气扰动产生相位误差,提出了抗干扰测量方法,有效降低了该误差;针对传统正弦相位调制干涉仪测量范围仅有半个波长的缺点,提出了一种新的相位展开方法,可将测量范围扩大上万倍;针对微小物体运动测量的要求,提出并构建了全光纤正弦相位调制半导体激光干涉仪,实现了对微泵等微小物体运动的纳米精度测量;另外,我们提出了纳米精度双波长实时干涉仪,使静态位移测量可以在亚毫米的范围内纳米精度地实时实现. |
| 英文摘要 | High-precision displacement measuring is becoming increasingly important to the progress of information technology and Micro-Electro-Mechanical Systems (MEMS), and so on. The optical interferometry has been widely studied by the researchers because of its high accuracy, high resolution and noncontact measurement. One of these is sinusoidal phase-modulating (SPM) interferometry. It has the advantages of high accuracy, simple modulation and compact structure, so it has attracted considerable interest of the researchers. In this paper, the problems in the conventional SPM interferometers are analyzed and several novel SPM interferometers are proposed to resolve these problems. Firstly, a LD-SPM interferometer with a photothermal wavelength modulation is proposed to decrease the measurement errors caused by the intensity modulation of the LD concurrent with the wavelength modulation of the LD. Secondly, an interferometer with a feedback system is proposed to eliminate the measurement errors caused by the LD wavelength fluctuation, vibration of the optical components and air disturbances. Thirdly, a method is proposed to enlarge the measurement range of the SPM interferometry. This method overcomes the disadvantage that the measurement range of the conventional SPM interferometers is only half wavelength of the light source. Fourthly, a fiber-optic interferometer that can be used to measure the movements of minute objects is proposed. The effect of the intensity modulation of the LD on measurement is eliminated and the diameter of the light beam is only 0.2 mm. Finally, a two-wavelength SPM real-time interferometer is proposed to measure displacements with nanometer accuracy in a large range. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15519]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 王学锋. 纳米精度微位移干涉测量技术的研究[D]. 中国科学院上海光学精密机械研究所. 2000. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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