微角位移干涉测量技术的研究
文献类型：学位论文
| 作者 | 张彩妮 |
| 学位类别 | 博士 |
| 答辩日期 | 2004 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 王向朝 |
| 关键词 | 角位移测量 正弦相位调制 Fabry-Perot干涉仪 激光微弧度发散角 |
| 其他题名 | Study on interferometric measurements of micro-angular displacement |
| 中文摘要 | 高精度角位移测量在工业、军事、航天、航海、通讯等领域有着广泛的应用。 激光干涉测量技术因为具有高精度、高分辨率、非接触性等优点，其研究在国际上一直受到高度重视。采用Fabry-Perot（F-P）干涉实现角位移测量具有明显的优势，F-P板构造简单，其前后表面反射光束间的光程差与光束到F-P板的入射角有明确的函数关系。反射光束所走路径基本相同，使其具有较强的抗干扰能力。采用F-P板干涉来实现高精度角位移测量需解决高精度测量光束到F-P板的初始入射角和干涉信号的相位变化两个难题，由于这两个问题一直未能得到很好地解决，自1970年D.Malacar。从理论上阐述了采用F-P板实现角位移测量的可能后，采用F-P板来实现角位移测量便少有报道。本论文提出的基于F-P板干涉角位移测量仪，由理论计算构造出角位移与F-P板干涉信号相位变化量间的函数关系，此函数与初始入射角无关。使用计算机处理采集的干涉信号，对干涉条纹进行细分，实现干涉信号相位变化量测量的高分辩率。解决了采用F-P板干涉实现高精度角位移钡l量的两个关键问题。为进一步提高角位移的测量精度，我们提出了正弦相位调制单F-P干涉测量仪。正弦相位调制干涉测量技术是一种国际前沿的干涉测量技术，具有精度高、调制方便、结构简单的优点。但由于角位移与干涉信号相位变化的非线性关系，在本工作之前这种干涉测量法一直未能用于角位移测量。本方法采用CCD探测F-P板反射光束光斑的中心距来求取光线入射到F-P板的初始入射角，利用正弦相位调制干涉术来高精度测量干涉信号的相位变化量。文中由误差分析得出此方法的角位移测量精度在10-8rad数量级，由实验得出重复测量精度为2.7×10-7rad。在角位移测量中为简化初始入射角的测量过程，我们又提出了双F-P干涉测量仪。由正弦相位调制干涉术高精度测得两F-P干涉仪的干涉信号的相位变化量，再由两相位变化量算得初始入射角。文中由误差分析得出此方法的角位移测量精度为1.12×10-8rad。由实验得出重复测量精度为2.1×10-7rad。此外为解决激光空间通信中光源的发散度的检测问题，我们还成功研发出激光微弧度发散角测量仪。 |
| 英文摘要 | Angular displacement measurement in high accuracy has been widely used in the areas of industry, military affairs, astronavigation, navigation and communication. The optical interferometry has attracted considerable interest of the researchers because of its high accuracy, high resolution and noncontact measurement. The method using Fabry-Perot (F-P) interferometer for measuring angular displacement has obvious advantages. The structure of F-P plate is simple. The optical path difference (OPD) between the reflections from two faces of a F-P plate is a function of the incident angle on the F-P plate. F-P interferometers are commonpath interferometers. They are insensitive to external disturbances. The use of F-P interferometer for measuring angular displacements needs to solve two problems, one is how to obtain the initial angle of incidence and the other is how to measure the OPD with a high accuracy. The two problems haven't been solved. There was almost no report of using F-P interferometer for measuring angular displacement since D. Malacara analyzed it in 1970. In this dissertation, we propose a F-P interferometer to measure angular displacement and solve the two problems. The beams reflected from two faces of a F-P plate interfere with each other. A function of angular displacement versus the phase variation of interference signal is obtained by theoretical calculation, and it doesn't include the initial angle of incidence. The interference signal is processed by a computer. The phase variation is obtained with a high accuracy by subdividing the fringes of the interference signal. To improve the measurement accuracy, we propose a sinusoidal phase-modulating (SPM) F-P interferometer. SPM interferometry has the advantages of high accuracy, simple modulation and compact size. The angular displacement is inherently nonlinear with respect to the phase variation of interference signal. This may be the reason why SPM interferometry has not been used in the measurement of angular displacement before our work. In our method, a CCD image sensor is used for measuring the distance between the reflected beams from the two faces of the F-P plate. From the distance, the initial angle of incidence is calculated. The SPM mterferometry is used for improving the measurement accuracy. The numerical calculation makes it clear that with the method the angular displacement can be measured with an accuracy of the order of 10" rad. The experimental results show that we can measure the angular displacement of the object with a measurement repeatability of 2.7×10-7rad. To simplify the process of measuring the initial incident angle, we propose sinusoidal phase-modulating double F-P interferometers to measure angular displacement. Two-phase variations of interference signals of the F-P interferometers are obtained. The initial angle of incidence is calculated from them. The numerical calculation makes it clear that with the method the angular displacement can be measured with an accuracy of 1.12×10-8 rad. The experimental results show that we can measure the angular displacement of the object with a measurement repeatability of2.1×l0-7rad. Besides these interferometers, we design and make a microradian divergence metrology to measure the angle of divergence of a laser beam. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15520]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 张彩妮. 微角位移干涉测量技术的研究[D]. 中国科学院上海光学精密机械研究所. 2004. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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