相位共轭移相干涉测量技术的研究
文献类型：学位论文
| 作者 | 钱锋 |
| 学位类别 | 博士 |
| 答辩日期 | 2002 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 王向朝 |
| 关键词 | 移相干涉术 相位共轭 相位展开 半导体激光器 |
| 其他题名 | Study on phase-shifting interferometry using phase-conjugate wave |
| 中文摘要 | 光学干涉测量具有非接触,高精度和高灵敏度的特点,目前已广泛应用于高密度信息存储,半导体制造,光通信,微电子机械系统以及精密机械制造等领域中.该论文主要研究了自泵浦相位共轭与移相干涉测量技术相结合实现纳米精度物体表面形貌测量的理论和实验,包括移相算法、相位共轭干涉仪、相位展开和半导体激光相位共轭特性等方面的研究和应用. |
| 英文摘要 | Due to the merits of noncontact, high accuracy and high sensitivity, optical interferometry has been widely used in the areas of high-density data storage, semiconductor industry, optical communication, micro-electromechanical system, and fine machine manufacture. In this dissertation, phase-shifting interferometry using self-pumped phase-conjugate wave for surface profile measurements with nanometer accuracy is studied. The researches involve phase-shifting algorithms, phase-conjugate interferometer, phase-unwrapping techniques, and laser-diode phase-conjugate characteristics. In phase-shifting interferometry, systematic errors in phase measurements can be analyzed through Fourier description methods. To reduce unwanted interference effects arising from backsurface reflections in optical surface profiling of a transparent plate, a wavelength-tuned laser Fizeau interferometer is constructed, in which the phase shifts are realized by modulating wavelength of the laser diode source. By employing the filtering characteristics of the phase-shifting algorithms to suppress the spurious reflections, we measure the surface profile of the plate with subnanometer repeatability. In addition, for quality monitoring of optical fiber connectors, a phase-shifting interferometer is constructed to measure key physical parameters of phase connectors. In laser phase-measurement interferometry, air turbulence and optical components in the interferometer can introduce phase distortions, and external vibrations can cause measurement errors. If a phase-conjugate mirror is used as one of the mirrors in an interferometer, any phase aberrations induced into the beam are exactly cancelled, and the uniform phase changes can be eliminated. Moreover, phase-conjugate interferometer has a twofold improvement in sensitivity. A phase-shifting Fizeau interferometer using self-pumped phase-conjugate wave is constructed for surface profile measurement with a repeatability of nanometer. The insensitivities of several phase-shifting algorithms to fluctuation of phase-conjugate wave are compared. Due to the nature of inverse trigonometric function, phase calculation can only provide principal data with the values between -πandπ. Phase unwrapping must therefore be carried out to remove the 2π phase jumps from the wrapped phase map by adding the unknown multiple of 2π to each pixel. For unwrapping noisy phase maps, three phase-retrieval techniques based on image processing and neural networks are developed. The method using adaptive median filters has not only high noise-rejection ability, but also both good phase-jump identification and image-detail preservation properties. Phase-unwrapping algorithm using phase-jump-region estimation can process noisy phase maps with the sequence of phase-jump elimination and noise filtering. Thus errors caused by filters are reduced. In regularized phase-tracking technique, the system tracks the instantaneous phase and spatial frequency by adapting a plane to the estimated unwrapped phase. We amend the cost function and apply simulated-annealing algorithm to optimize its solutions in order to find global minima. Laser diodes possess the advantages of small size, low price, and wavelength tunability. For constructing a practical laser-diode phase conjugator, the pulsed and continuous phase-conjugate characteristics of laser diodes are investigated, respectively. From the optical paths in the photorefractive crystal, their working mechanisms are studied. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15522]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 钱锋. 相位共轭移相干涉测量技术的研究[D]. 中国科学院上海光学精密机械研究所. 2002. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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