正弦相位调制角位移干涉测量技术的研究
文献类型：学位论文
| 作者 | 郑德锋 |
| 学位类别 | 博士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 王向朝 |
| 关键词 | 角位移测量 干涉测量 光学检测 正弦相位调制 |
| 其他题名 | Study on sinusoidal phase-modulating interferometry for angular displacement measurement |
| 中文摘要 | 角位移是几何量测量中的一个重要的物理量。近年来，随着精密加工与精密制造技术的飞速发展，角位移测量技术在装调、校准以及精密控制中有着广泛的应用需求。基于光学干涉法的角位移测量技术由于具有精度高、非接触、动态测量范围大等优点而得到了越来越多的关注。正弦相位调制(SPM)干涉测量技术是一种国际上先进的准外差测量技术，具有测量精度高、调制方便、测量装置结构紧凑等优点，近年来在诸多领域得到了广泛的应用。本论文以实现高精度角位移测量为目的，将SPM干涉测量技术引入到角位移干涉测量技术中，在平板干涉角位移测量技术和双棱镜式角位移干涉测量技术等方面展开深入研究。本论文的主要研究内容包括： 1．利用误差理论对课题组已有的正弦相位调制角位移干涉测量技术进行误差分析，确定影响角位移测量精度的主要因素及其影响程度，为进一步提高角位移测量精度和分辨率提供理论基础。通过数值模拟，讨论了光束的初始入射角、平行平板的厚度和折射率等参数的选取原则，并对半导体激光器中心波长受温度影响所导致的角位移测量误差做了详细分析。分析结果表明光束的初始入射角存在最佳入射值，合理的选取平行平板的厚度和折射率等参数有助于降低误差传递系数，进而提高角位移测量精度。因温度变化所导致的波长漂移在微小测量范围内对角位移测量精度的影响可以忽略不计。 2．提出一种新型平板干涉角位移测量技术。在角位移测量过程中，使用PSD探测光束初始角，实现了非暗室环境下光束初始入射角的高精度测量。采用光程差放大技术，使角位移测量的灵敏度提高3倍。在该技术中还引入了自比较干涉的思想，通过控制入射到平板上的光束初始角的大小形成平板横向剪切干涉，提高了测量的抗干扰能力。误差分析表明基于该技术的角位移测量精度可达10-8弧度数量级。角位移测量实验验证了该技术的可行性。此外，该技术中的初始角测量方法还可用于偏转角的测量，在被测物体的装调过程中，该方法有着很好的应用前景。 3．在平板干涉角位移测量技术的研究基础上，研发了一台“DMI-03纳弧度分辨率角位移干涉测量仪”样机。该样机结构相对简单，体积小，使用方便，可对被测物体的微小角位移进行高精度检测。经华东国家计量测试中心测试，该样机的角位移测量分辨力小于60纳弧度。 4．提出一种双棱镜式角位移干涉测量技术。在迈克尔逊干涉仪中引入正弦相位调制干涉术，形成一种准外差干涉测量仪。利用双直角棱镜作为回返器构成差动测量臂，将转角的测量转化为干涉信号相位差的测量。该技术使得原有测量装置中的双棱镜不必关于旋转中心对称放置，降低了装调的要求。应用该技术进行角位移测量，可以满足高灵敏度的测量要求，测量精度高，抗干扰能力强。实验结果表明该技术的角位移测量精度可达10-8弧度数量级。 |
| 英文摘要 | Angular displacement is an important measurands in geometric sense measurements. In recent years the angular displacement measurement has widespread applications in the fields of alignment, assembly and precision control, with the rapid development of precision machining and manufacturing. There has been an increasing focus on the measurement technique of angular displacement based on optical interferometry, because the interferometry has the advantages of high precision, non-contact and large dynamic range, etc. Sinusoidal phase-modulating (SPM) interferometry is an advanced quasi-heterodyne technique. It has the features of high precision, easy modulation, and compact structure of the setup, and has got widespread applications in many areas. In this dissertation, SPM interferometry is introduced into the research of angular displacement measurement in order to increase the measurement accuracy. The parallel plate interferometry and Michelson interferometry with two prisms, which are used for measuring angular displacement, are studied. The main research work is as follows: 1. The existent measurement technique of angular displacement based on sinusoidal phase-modulating interferometry is analyzed by using the method of error analysis. The main factors that influence the measurement accuracy are discussed. The choice principles of the initial incident angle, the thickness and refraction index of the plane-parallel plate, are determined. Besides, the influence of wavelength shift of laser diode with the temperature variation, on the measurement accuracy of angular displacement, is analyzed in detail. The analysis results show that there is an optimal value of initial angle of incidence. And suitable parameters, such as the refraction index and thickness of plane-parallel plate, contribute to small error transfer coefficients, which increases the measurement accuracy of angular displacement. Besides, the influence of wavelength shift caused by temperature variation on the measurement accuracy of angular displacement can be ignored within the minute measurement range. 2. A new parallel plate interferometry for measuring angular displacement is proposed. A position sensitive detector (PSD) is used in this optical configuration, which makes it into reality to measure the initial angle with high accuracy in non-dark environments. In this interferometry, an amplification technique of optical path difference is used to increase the sensitivity of the angular displacement measurement by three times. An idea of self-comparison interference is introduced into the interferometry. The lateral shearing interference is formed by choosing suitable initial angle of incidence, which increases the ability of anti-disturbance. The error analysis shows the measurement accuracy of the parallel-plate interferometer can reach to an order of 10-8rad. The experimental results verify the feasibility of the technical proposal. In addition, the measurement method of the initial angle can be applied to measure the deflection angle of an object. The method has a good application prospect, especially in the process of the measured object’s adjustment or alignment. 3. On the research basis of the parallel plate interferometry for measuring angular displacement, a sample instrument of the interferometer with nano-radian resolution for angular displacement measurement is researched and developed. The sample instrument, which has the features of relative simple structure, small volume and convenient operation, can be used to measure the angular displacement with high accuracy. The measurement resolution of the sample instrument is less than 60 nano-radian, according to the testing results offered by the National Center of Measurement and Test for East China. 4. An interferometry using two prisms for measuring angular displacement is proposed. The SPM interferometry is introduced into the Michelson interferometer, which forms a quasi-heterodyne interferometer. The differential measurement optical path with two right-angle prisms converts the angular displacement of measured object into the phase difference of interference signal. The interferometry can meet the demands of high measurement sensitivity. Besides, the position symmetry of the two prisms in the original optical configuration is not required. The experimental results show that the measurement accuracy of the angular displacement can reach to an order of 10-8 rad. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15525]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 郑德锋. 正弦相位调制角位移干涉测量技术的研究[D]. 中国科学院上海光学精密机械研究所. 2007. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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