β-BBO/α-BBO复合非线性光学材料的制备及性能研究
文献类型：学位论文
| 作者 | 刘军芳 |
| 学位类别 | 博士 |
| 答辩日期 | 2005 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 徐军 |
| 关键词 | β-BBO薄膜 液相外延 脉冲激光沉积 气相传输平衡 α-BBO衬底 |
| 其他题名 | The study on the fabrication and properties for β-BBo/α-BBO composite nonlinear optical material |
| 中文摘要 | β-BBO晶体是一种新型的非线性光学材料，尤其是应用在紫外波段，具有较大的应用市场。近年来，随着激光技术向集成化、小型化方向发展，特别是飞秒激光技术领域中，为了克服因晶体厚度带来的基频光与倍频光之间群速度失配的问题以及脉宽展宽的问题，常常需要较薄的β-BBO晶体作为倍频器件，而β-BBO晶体较软、机械强度较低，在加工过程中尤其是在加工成较薄的零件过程中存在易破裂、变形等问题，这远远不能满足迅速发展的高功率超快激光技术的需要。因此，β-BBO单晶薄膜的制备、性能及其应用研究具有重要的意义。本论文意在将β-BBO薄膜的优良性能与新型的制备工艺以及新型的衬底材料有机地结合在一起，以探索新型的、符合激光技术发展需要的β-BBO／α-BBO复合非线性光学材料。选取提拉法生长的Sr2＋：α-BBO单晶作为衬底材料，分别采用液相外延法、脉冲激光沉积法以及气相传输平衡法制备β-BBO／α-BBO复合非线性光学材料。用提拉法生长了掺银的α-BBO单晶，并对sr2＋：α-BBO单晶衬底的物相、光学性能及热学性能进行了研究，对sr2＋：α-BBO单晶的缺陷进行了初步的探讨。首次使用液相外延法进行了β-BBO／α-BBO复合非线性光学材料的制备。实验选取Na2O做助熔剂，分别讨论了衬底取向、生长温度、旋转速率、生长时间以及外延方式对薄膜质量的影响，并对薄膜的二次谐波效应以及表面形貌、缺1陷进行了研究。在KrF准分子激光沉积系统上进行了β-BBO／α-BBO复合非线性光学材料的制备。实验选取β-BBO陶瓷作为靶材，研究了沉积温度以及高温退火对薄膜质量的影响。、将气相传输平衡技术创新性的用于β-BBO／α-BBO复合非线性光学材料的制备。分析了粉料配比、衬底取向、VTE处理温度、处理时间对薄膜质量的影日I句。实验证明，液相外延法以及气相传输平衡技术制备β-BBO／α-BBO复合非线性光学材料是可行的。当采用脉冲激光沉积技术时，选取尽BBO陶瓷作为靶材替代β-BBO单晶靶材，在节约成本方面具有重要的意义。研究结果表明，采用三种方法制备β-BBO／a一BBO复合非线性光学材料，当衬底为（001）取向时，生长的β-BBO薄膜均呈c轴择优取向，薄膜的双晶摇摆曲线半峰宽值FWHM均在1000"左右，表明薄膜具有较高的晶格完整性，同时，分析表明，α-BBO单晶将会成为一种很有前途的β-BBO外延衬底材料。 |
| 英文摘要 | The low temperature phase of barium borate (j#-BaB2O4, so called J#-BBO) is a novel nonlinear optical (NLO) crystal, especially in ultraviolet (UV) wavelength. It has widespread application market. Recently, with the integration and miniaturization of laser techniques, in order to meet the demand of the development of femtosecond laser techniques and integration optics, to resolve the problems of group velocity mismatching, pulse spreading and so on in the J#-BBO crystal which caused by the thickness, ultra-thin j#-BBO crystals are needed. Since v#-BBO is one of soft crystals with low mechanical strength, it is difficult to prepare micro magnitude or ultra-thin J3-BBO specimen. There do exist the problems of cracking, distortion and so on in the course of grinding and polishing the sample. In order to solve these problems, preparation, properties and application of thin films of j#-BBO is a subject of intense research. The aim of our current work is to search for a novel substrate and new techniques for the formation of crystalline β-BBO films. In this paper, we use Sr2+-doped a -BBO crystals which have been grown by Czochralski method as substrate and report the growth and the characterization of P -BBO / a -BBO composite nonlinear optical material by liquid phase epitaxy (LPE), pulsed laser deposition (PLD) and vapor transport equilibration (VTE) techniques. Sr^-doped a -BBO crystals have been grown by Czochralski method. The as-grown crystal is justified to be a -BBO by X-ray diffraction and Raman spectrum. The optical properties of Sr2+-doped a -BBO crystals are investigated in detail through the transmission spectra (190-2500 nm) and birefractive indices. The thermal properties of Sr2+-doped a -BBO crystals are performed by DSC-TG and thermal expansion coefficients. And the defects are studied by etching study together with optical microscopy. β-BBO β-BBO composite nonlinear optical materials have been successfully fabricated by LPE technique from BaB2O4-Na2O fluxed melts for the first time. We focus on the effect of orientation of substrate, growth temperature, rotation rate, dip time and methods of LPE growth in the control of film crystallinity. And the surface micrographs, defects and second harmonic generation (SHG) property are studied. The PLD experiments are performed using the KrF excimer. The stoichiometric disc-shaped β-BBO ceramics is chose as target. The effect of deposition temperature (substrate temperature) and anneal on film crystallinity is investigated. j#-BBO β-BBO composite nonlinear optical materials have been successfully prepared using VTE technique. This is the first attempt of fabricating β-BBO layer on Sr2+-doped a -BaB2O4 substrate by VTE. The effect of powder ratio, orientation of substrate, VTE treatment temperature and VTE treatment time in the control of orientation quality and microstructure of the films is discussed. The experimental results show that it is promising to fabricated-BBO / #-BBO composite nonlinear optical materials by optimizing the parameters of LPE and VTE techniques. We choose j#-BBO ceramics which is easy to fabricate to substitute jtf-BBO single crystal as target using PLD technique. It offers the advantage of saving cost and energy. The results of X-ray diffraction indicate that the films show highly (00/) preferred .orientation on (OOl)-oriented substrates by LPE, PLD and VTE techniques. The full width at half-maximum of the rocking curve for the film is as low as as low as about 1000" , which shows the high crystallinity of the thin film. Meanwhile, results reveal that o-BBO single crystal may be a promising substrate proper to the growth of J#-BBO films. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15547]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 刘军芳. β-BBO/α-BBO复合非线性光学材料的制备及性能研究[D]. 中国科学院上海光学精密机械研究所. 2005. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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