微光学元件的应用研究
文献类型：学位论文
| 作者 | 底彩慧 |
| 学位类别 | 博士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 周常河 |
| 关键词 | 微光学 湿法刻蚀 Dammann光栅 超分辨效应 光存储 |
| 其他题名 | Research on novel applications of micro-optics elements |
| 中文摘要 | 微光学是光学、微电子学和微机械学相互渗透、相互交叉而形成的一门新型学科。近年来，成熟的超大规模集成电路处理技术在微光学元件加工中的灵活应用推动了微光学的快速发展。微小化、阵列化和集成化的光学元件和系统的开发应用极大地引起了人们对微光学元件的关注。微光学元件以其效率高、体积小、重量轻、易于复制等优点在众多领域中有着广泛的应用。与微光学领域相关的设计、制作与应用的研究受到了越来越多的重视。本论文旨在研究微光学元件在光通信和光存储领域的新型应用。主要内容如下： 1.微光学元件湿法制作流程的研究。湿法刻蚀技术具有成本低廉、加工工艺简单等优点，在微光学元件的制作过程中有着广泛的应用。我们详细介绍了利用普通紫外光源接触式光刻技术和湿法刻蚀技术制作高质量、高性能微光学元件的工艺流程，以及制作过程中各个工艺步骤需要注意的事项。对清洁、涂胶、曝光、显影、刻蚀等等工艺步骤进行了研究，分析了各加工环节不同工艺参数对元件制作的影响，并依据实验经验和制作结果对工艺流程进行了相应的改进优化。最后我们给出了湿法刻蚀制作的高精度64×64 Dammann光栅的检测结果。成功制作的高精度微光学元件具有广泛的应用前景。这项工作为进一步的实验工作奠定了坚实的基础。 2.Dammann动态光耦合器的研究。我们提出了两种基于Dammann光栅衍射特性的动态光耦合器，只需控制耦合器中特殊光栅结构的位移参量，就能实现光分束与光合束功能的动态转换。实验验证了Dammann动态耦合器的可行性，对两种结构的1×8 Dammann动态耦合器进行了测试，得到了理想的实验结果。并进一步讨论了制作误差、对准误差和波长依赖性对耦合器性能的影响以及今后的改进方向。Dammann动态光耦合器具有结构简单、易于调节、体积小、能耗低等优点。其核心元件Dammann光栅可采用成熟的微光学湿法刻蚀工艺制作，易于大批量生产。目前有多种方法制作光耦合器，但都还不能适应未来发展的中大规模耦合器阵列的要求。我们的动态光耦合技术对微光学元件在光通信中的应用具有积极的推动作用。 3.光学超分辨光存储技术的研究。光存储中聚焦光斑的尺寸决定于系统所用激光波长和透镜数值孔径，更小的聚焦光斑对于光存储来说至关重要。然而，以目前的技术手段不可能无限制地提高光盘中透镜的数值孔径和缩短激光波长。本论文以超分辨位相板在光盘系统中的应用为背景，对采用位相型光瞳滤波器的超分辨光存储技术进行了原理性的静态实验验证；由于光盘读取头中的实验验证对实验设备和实验条件要求比较高，实验没有涉及。我们在现有光存储系统结构的基础上搭建了一套超分辨光存储的静态实验装置，采用了压缩比为0.8的三环二值位相型光瞳滤波器，对比了不同数值孔径透镜情况下有无超分辨位相板对聚焦光斑的影响。通过大量的实验工作，着重研究了模拟轨道（或光盘）移动过程中聚焦光斑的变化情况，给出了0.45数值孔径透镜读取CD光盘和0.65数值孔径物镜读取DVD光盘的超分辨衍射图像。实验结果充分证明了此技术的可行性：光学超分辨光存储技术能够在不改变物镜数值孔径和激光器波长的情况下，减小读出光斑的主瓣直径，实现更高密度的信息存储，同时只需要增加很低的成本。 |
| 英文摘要 | With the development of modern optics and photoelectrics, micro-optics becomes an important subject of synthesizing optics, microelectrics, and micro mechanism. In recent years, micro-optics has achieved great progress due to the successful application of VLSI processing technology in the fabrication of micro-optics elements. Micro-optics elements have comprehensive applications in many fields with the attractive advantages of high diffractive efficiency, small dimension, low weight, and mass production. Design, fabrication, and application of micro-optics elements are highly interesting nowadays. This dissertation concentrates on the novel applications of micro-optics elements in optical communication and optical data storage. The main contents are as follows: 1. Detailed fabrication process of high-precision micro-optics elements. In light of the low cost as well as the easy processing technique for the wet etching method, it has been applied widely in fabrication of micro-optics elements. This dissertation gives a detailed description on fabrication process of conventional contact photolithography and the wet etching technology based on K9 glass. The processes of photolithography and wet etching are also discussed. Moreover, the effects of various process parameters on the quality of micro-optics elements are studied. Based on the experimental experience, some notifications are obtained to improve the fabrication procedure. We found the reacting condition of photoresist, K9 glass, and corrosion reagent and also the best process flow and technological operation leading to the high-quality and high-precision micro-optics elements. This work is very useful for fabrication of micro-optics elements. 2. Research on Dammann-grating-incorporated dynamic optical couplers. Dammann grating is well known for its ability to generate arrays of uniform-intensity beams from an incoming monochromatic beam. In this dissertation, two dynamic optical coupled systems are presented based on the diffractive property of Dammann gratings. The systems can easily realize the dynamic function as either a beam splitter or a combiner by controlling the shift of the special designed Dammann gratings. We have experimentally demonstrated high performance 1×8 dynamic couplers with high efficiency, low insertion loss, and good uniformity. Furthermore, we analyze the effects of fabrication errors, the alignment error and wavelength dependence on efficiency and uniformity when the devices work as splitters. The experimental results are analyzed in detail. As the important devices in optical information-processing applications, Dammann beam splitters have high efficiency, high uniformity, low loss, and compact size by using binary optical technology. In addition, the systems are preferable approaches in the integral packaging. The devices have the unique advantages of Dammann-grating-incorporated system for dynamic optical coupling of a large fiber array. Note that this method is generally applicable and should be interesting for practical use. 3. Application of superresolution technology in optical storage system. Smaller focal points are essential for the development of the next-generation optical disc. The size of focal point depends on the diffraction effect that is dependant on the numerical aperture of a lens and the wavelength of light. However, increase of the numerical aperture and decrease of the light wavelength will be ultimately limited due to the technical difficulty. In this dissertation, we studied the application of optical superresolution technology in read-only optical disk system. A superresolution optical pick-up device is built up by simulating the pick-up head of commercial DVD-ROM driver. This dissertation investigates the effect of the presence of superresolution phase filter on focal pattern with objective lenses having different numerical aperture and the variation of the focused pattern under the simulated moving track. By employing a specially designed annular superresolution pure-phase filter, the possibility of achieving high-density storage in read-only optical disk system is demonstrated in the static experiment. The experimental results are analyzed in detail. The experimental results show that it is feasible to use the superresolution filter to enhance the storage capacity of optical disk system. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15590]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 底彩慧. 微光学元件的应用研究[D]. 中国科学院上海光学精密机械研究所. 2007. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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