移相干涉术的高精度检测处理技术研究
文献类型：学位论文
| 作者 | 李永国 |
| 学位类别 | 博士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 光学检测 移相干涉术 图像处理 相位分布 测量误差 |
| 其他题名 | Research on High-accurary Optical Testing Technology Based on Phase-shifting Interferometry |
| 中文摘要 | 精确表征光学元件的表面变形、像质特性，以及延伸出来的加工检验与评价等是光学检测中很重要的研究方向。目前，光机电算的多学科交叉是高精度光学干涉测量技术发展的大趋势。随着干涉仪硬件系统的发展达到物理极限，或者是出于降低成本的考虑，人们越来越重视和依赖干涉图信息处理技术，希望以此来弥补不可避免的测量误差，提高精度。干涉图的处理与判读已是干涉计量发展的一个前沿学科。 高精度光学检测技术也是高功率激光系统安全、高效运行的必要保障。因为高功率激光系统光束质量的分析和预测很大程度上也取决于对其光学元件质量的精确检测和评价。在发展合适的光学检测评价方式和提高测量的精准度方面，多年来人们已经做了不少研究，但很多瓶颈问题尚未得到圆满解决。比如：干涉图的预处理滤波与自身信息丢失的问题；因受到测量环境，移相器和探测器的线性、非线性响应的影响，造成移相干涉相位提取失真的问题；波面评价指标不完善等。有必要对这些问题作深入的研究和探讨。本文在总结前人工作的基础上，对基于移相干涉术的实现高精度光学元件检测处理技术作了深入的研究，主要包括以下几方面的工作： 1. 研究了包裹相位场在消除噪声方面的特别要求。首次提出了基于向量滤波法对包裹相位场进行预处理的思想。实验证明该滤波技术在抑制噪声的同时增强了干涉条纹的清晰度，能较好地保留原有信息。比较分析了二次均值滤波与向量滤波在包裹相位场预处理滤波的不同效果，给出了滤波模板的选取和功率谱密度（PSD）的曲线分布关系，向量滤波预处理后频谱信息的丢失远小于二次均值滤波。 2. 相位提取技术是移相干涉信息处理中的核心技术，即从被调制的干涉图中提取出待求相位信息。为了深刻地认知高阶非线性响应造成谐波误差与相位结果关系，引入了相位提取算法的评价函数，用它可以对谐波误差做全面分析。推导了测量时的随机误差对相位结果的影响。研究了移相器的偏移量与相位误差之间的定量关系。理论推导了探测器非线性响应的谐波误差与相位误差之间的定量关系。 3. 相位展开也是移相干涉术信息处理中的关键技术。文中对比研究了路径积分相位展开法和最小二乘相位展开法。理论分析和实验证明，路径积分法简单易行，但局限性强，在处理有较多残差点或噪声严重的位相数据时，局部产生严重的错误；最小二乘相位展开法的算法健壮，能避免严重的局部误差，求解特性是相当于低通滤波。 4. 设计了移相干涉的高精度信息处理方案。探讨了波面梯度作为检测参量的意义，它能直观地反映光束聚焦特性与光束的波前分布。通过对Zygo干涉仪采集的实际干涉图分析，给出了与之对照的波面重建和测量值。 |
| 英文摘要 | The precise characterization of the optical surface deformation, the image quality characteristics and the extension of the testing and evaluation process is a very important on optical testing research. Currently, multi-disciplinary cross with optical, mechanical, electrical and algorithm technology is development tendency to high precision interferometer measurement system. Along with the interferometer hardware system development achieved the physical limit, or for cost reduction, there is a growing emphasis on interferogram processing, and plans to deal with interferogram to makes up the inevitable measuring error, and to improve the measurement accuracy. Discipline of Interferogram processing and analysis are in a forward position in interferometry. Precise testing and evaluation of optical elements guarantee the high power laser system works safely and efficiently. The beam quality analysis and accuracy forecasting of the high power laser system depends to an accurate evaluation of its optical elements. For many years, a lot of works have been done to carry out the suitable optical testing and accuracy evaluation indicators, but many bottleneck problems has not yet been resolved satisfactorily. For instance, the problem of interferogram pre-filtering with their own information loss; extraction phase distortion in phase-shifting interferometry resulting from measurement environment, phase shifter’s, and the detector’s linear, nonlinear response; imperfect evaluation about wavefront and so on. There are still many issues that need thorough study and discussion. On the basis of predecessors’ studies, the dissertation carry out the further research on high-accuracy optical testing technology based on phase-shifting interferometry. It mainly consists of the following aspects: 1. Special request has been analyzed about the elimination noise in wrapped phase field., For the first time, one kind of fast effective vector filter based on the vector mapping thought has been designed. The experiment proved that the technology could strengthen the interference fringe clarity during noise elimination, and had the good retention of the original information. Through the experiment, different effect has been showed with comparative analysis between twice average filter and the vector filter in wrapped phase field. The relation has been achieved of filter template selection and the curve distribution of power spectral density (PSD). The frequency spectrum information loss after pretreatment though vector filter was smaller than twice average filter. 2. Phase Extraction technology is core technology of shifting interferometer signal processing, that is, which extracted phase information to be requested from the modulation interference. To profound understanding high-order harmonics caused nonlinear response and phase errors result, they were introducted that the evaluation functions for phase extraction algorithm. The evaluation function can be obtained through takes the mold to the sampling function Fourier transformation.In view of non-linear harmonic error, it has also developed the evaluation function to phase extraction algorithm. There was influence with random measurement errors to the phase results. Studied Quantitative relationship for the phase shifter offset to the phase error. The quantitative relationship of theoretical derivation was successed between for the detector nonlinear response to phase error. 3. Unwrapping phase technology is key technology of shifting interferometer signal processing. It was discussed that general principle and the assumption about phase unwrapping. Comparative analysis of the path integral phase unwrapping method and least squares phase unwrapping method. Theoretical analysis and simulation experiments show their superiority and the limitation. The path-following algorithm can be used in automation analysis of fringe patterns with little influence of noise, because of its simple and fast advantages. But there are significant limitations in dealing with serious noise phase field map, will lead to local serious error. The effective phase unwrapping algorithm based on the least squares eliminates or prevents the propagation of errors introduced at some locations on surface. The phase unwrapping technique based on the least squares is robustness, and able to avoid serious partial error, Its solution properties is equivalent to low-pass filtering. 4. Designed the Phase-Shifting Interferometry information precision processing program. In order to better reflect the surface distortion of optical element, the wavefront gradient detection parameters was introduced. Wavefront gradient parameter was discussed, as one of significance indicators of reflected beam focusing properties of the beam and wave-front distribution. Finally, the interpretation was performed through the application of experimental.Through actual interferogram analysis which acquired from the Zygo interferometer has produced wave-front reconstruction and measurement. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15603]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 李永国. 移相干涉术的高精度检测处理技术研究[D]. 中国科学院上海光学精密机械研究所. 2007. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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