集成式光学干涉三维振动测量研究
文献类型：学位论文
| 作者 | 张雪洁 |
| 学位类别 | 博士 |
| 答辩日期 | 2013 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 振动测量，干涉仪，球面波，三维振动 |
| 其他题名 | Study on Integrated Interferometer for Three-dimensional Vibrations Measurement |
| 中文摘要 | 用于惯性约束聚变（ICF）的高功率激光驱动装置是一个大型的超精密光学系统，光束传输距离长，涉及的光学元件多。振动作为主要的动态误差，通过光学元件会使光束产生平移、角漂或旋转，最终影响到打靶的成功率。因此，了解高功率激光装置中光学元件及支撑结构的低频振动状况是很有必要的。 目前采用的方式都是对加速度进行测量，反映的振动不够直观。而传统的激光振动测量技术对位移进行测量时都是运用平面波，物体的振动有六个自由度，但平面波干涉只能测量光轴方向一个自由度的振动，对其他维度振动不敏感；而且测量精度会受波长稳定性、外界环境振动、声学扰动等因素影响。针对目前干涉仪存在的不足，本论文主要围绕监测干涉仪自身稳定性提高测量精度、三维振动测量进行分析和研究，研究成果包括： 1. 分析了球面波干涉是实现多自由度振动测量的关键技术。理论推导了球面波形成的干涉条纹表达式，并通过数值模拟，讨论了点光源位置变化对干涉条纹的影响。干涉条纹为一族同心圆；点光源x（或y）方向的移动会引起圆心位置变化，z方向移动会引起中心点光强变化。 2. 提出一种分孔径三维振动测量方式。它具有双迈克尔逊干涉设计，实现了被测物体振动与外界干扰因素的分离，能够同时对光轴方向振动和角振动进行测量。该系统的分辨率可以在一定范围内方便调节，透镜到小孔的距离越大，或者光程差越小，系统的分辨率就越高，测量范围越小，提高了实用性。分析了光路结构中的误差来源，以及对测量精度的影响。 3. 提出基于球面合作目标的三维振动测量方案。在保持双迈克尔逊干涉基础上，实现物体平面内振动和光轴方向振动测量，振动直观、参量提取简单。该方案也可用于角振动测量，结构五维敏感。从对比度与条纹数两个角度，讨论球面反射镜曲率半径的选择，在光路设计中有重要的实际应用。 4. 开展了一系列振动测量实验。(1) 利用两列球面波的干涉对光轴方向振动、角振动进行测量。该方式对低频振动具有很好的测量能力，测得频率准确。1Hz时，光轴方向振动测量精度1nm，角振动测量精度5μrad。(2) 进行分孔径、双迈克尔逊干涉实验，实现干涉仪自身稳定性监测，并利用频谱滤波的方式提高了测量精度，证明此种方式的可行性。(3) 利用球面反射镜对物体平面方向振动进行测量，圆心位置变化直接反映被测物体振动，快速直观。 |
| 英文摘要 | High power laser for inertial confinement fusion (ICF) is a large and super-precision facility with a great many optical elements and long distance transmission. As the main dynamic error, vibration causes beam translation or rotation, and ultimately affects the shooting success rate. Therefore, it is necessary to understand the vibrations of optical elements and their supporting structures. At present, vibrations are reflected by measuring the acceleration. But it isn’t visualized. Conventional interferometers mostly use plane wave and measure vibration displacement. An object has six degrees of freedom, but the interference based on plane wave can only measure vibration in the direction of optical axis. It is insensitive to vibrations in other degrees of freedom. And the measurement accuracy is affected by the wavelength stability, acoustic disturbance, environment vibration, etc. This paper mainly focus on measuring three-dimensional vibrations, monitoring interferometer itself stability and improving measurement accuracy. The research results are summarized as follows. 1. Interference based on spherical wave is the key technology to achieve multi-degree-of-freedom vibration measurement. Theoretical expressions of interference fringes are obtained. The effect of point source position on interference fringes is discussed by numerical simulation. The interference fringes are a series of concentric circles. The movement of point source in the x (or y) direction and z direction can cause change in the center position and intensity, respectively. 2. An integrated interferometer for measuring three-dimensional vibrations by discrete aperture is proposed. It has double Michelson interference design, and achieves the separation of object vibration and external disturbance. The vibration in the optical axis direction and angular vibrations can be measured simultaneously. The resolution can be adjusted conveniently and increase as the distance between the lens and pinhole increases and the optical path difference decreases. The error sources and their effects on accuracy are analyzed. 3. A three-dimensional vibration measurement system based on spherical cooperative target is proposed. It maintains the design of double Michelson interferometer and can measure the in-plane vibration. It also can be used for the angular vibration measurement. So it is sensitive to five degrees of freedom. From the fringe contrast and the number of interference fringes, the selection about radius of curvature of spherical mirror is discussed. It has important practical application in system design. 4. A series of experiments is carried out. (1) Using the interference of two spherical waves, the vibration in the optical axis direction and angular vibrations are measured. This method has a good measurement capability for the low-frequency vibration. At 1Hz, the accuracy in the optical axis direction is 1nm and angular vibration measurement accuracy is 5μrad. (2) Double Michelson interference experiments are carried out. It can distinguish that the vibrations are from the measured object or from laser interferometer system itself. Through frequency spectrum filtering, the accuracy is improved. (3) The in-plane vibration is measured using spherical mirror. Change in the center position reflects the object vibration directly. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15758]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 张雪洁. 集成式光学干涉三维振动测量研究[D]. 中国科学院上海光学精密机械研究所. 2013. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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