纳秒激光诱导光学薄膜的多脉冲损伤研究
文献类型：学位论文
| 作者 | 王营 |
| 学位类别 | 博士 |
| 答辩日期 | 2011 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 邵建达 ; 易葵 |
| 关键词 | 光学薄膜，多脉冲，累积效应，纳秒激光，激光损伤 |
| 其他题名 | Multi-shot laser-induced damage mechanisms of optical thin films at nanosecond laser |
| 中文摘要 | 多脉冲激光作用下，光学元件的激光损伤值往往低于单脉冲的损伤闲值，这种现象被称为多脉冲的累积效应。累积效应的存在直接影响了光学薄膜的使用寿命，但是对于激光薄膜多脉冲损伤研究还缺乏系统论述。本文主要从多脉冲激光与薄膜相互作用出发，深入地研究了多脉冲激光作用下光学薄膜的损伤特性和机制。根据国际标准IS011254-2搭建了多脉冲损伤测试装置。结合实验室实际条件，对光学薄膜的累计损伤的实验方法和数据处理做了相应的规定。研究了常用光学薄膜的多脉冲损伤特性和规律，确定了损伤I=}J值、损伤概率与脉冲数目的关系，为进一步研究光学薄膜多脉冲的损伤机理奠定基础。实验结果表明:通常光学薄膜的多脉冲损伤17值随脉冲数目的增加单调递减，并且在脉冲数目足够大时趋于稳定，同时损伤形貌显示薄膜的多脉冲损伤仍是由缺陷引起。单脉冲损伤阑值高的光学薄膜，其累积效应更加明显。实验表明YAG基底的减反膜的损伤闽值低于K9基底的减反膜，可见基底材料对减反膜的损伤有影响。通过对热退火处理后的薄膜进行损伤实验，探索提高薄膜抗损伤的方法。 |
| 英文摘要 | It is well established that the laser-induced damage threshold (LIDT) of optical elements for multi-shot exposures is always lower compared to single-shot LIDT, an effect sometimes callled accumulation effect. The lifetime of optical thin films is limited by accumaulatiomn effect. In this paper, the characteristics of laser-induced damage and mechanisms of multi-shot irradiation were studied systematically. The experimental setup of the laser-induced damage and the multi-shot laser-induced damage procedure based on international standard IS011254-2 were introduced. The procedure and data processing of the experiment were discussed in order to test the accumulation effect. Multi-shot laser induced damage behavior of different optical coatings was studied. The LIDT and damage probability as a function of pulse number were investigated, which lay a foundation for the scientific study of the repetitive frequency laser damage phenomena and mechanism of optical coatings. Deposited methods and process played a role on accumulation effect. It is easy to observe an obvious accumulation effect in optical thin films which have a higher single shot LIDT. The multi-shot LIDTs drop monotonically with shot number to a maximum. The damage behavior of optical thin films on different substrate was investigated. The LIDT of 1064nm AR on K9 is higher than that when it was on YAG. The impact of post treatment methods on the damage characteristics of optical film was investigated. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15827]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 王营. 纳秒激光诱导光学薄膜的多脉冲损伤研究[D]. 中国科学院上海光学精密机械研究所. 2011. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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