小光斑扫描激光预处理系统集成控制与工艺优化
文献类型：学位论文
| 作者 | 刘晓凤 |
| 学位类别 | 博士 |
| 答辩日期 | 2011 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 邵建达 ; 赵元安 |
| 关键词 | 激光预处理，基频反射膜，激光损伤，功能性损伤闽值，节瘤缺陷，等离子体烧蚀 |
| 其他题名 | Integration control of the small-beam conditioning system and process raster-scan laser optimization |
| 中文摘要 | 激光预处理技术作为提高光学元件抗激光损伤能力的有效手段，引起了人们的广泛关注和研究。在高功率激光驱动器建设的牵引下，激光预处理技术已经成为解决部分大口径光学元件激光负载能力的关键技术途径，在美欧等国已进入了工程实用阶段。搭建小光斑扫描激光预处理系统以及研究激光预处理工艺对解决国内实际工程问题具有重要的应用价值。为此本文开展了激光预处理技术研究，主要有以下几个方面:搭建了大口径光学元件激光预处理平台。该平台集成了激光脉冲稳定输出、能量精密调节、光束特性实时监控视、机械精确定位、损伤实时准确诊断、数据流及时处理等一系列功能，可以实现快速、稳定、无人值守的全自动化运行。 基于激光预处理是允许不影响系统正常运行的良睦损伤存在的事实，对基频反射膜中的典型损伤形貌进行了研究。研究表明锥形坑、等离子体烧蚀以及平底坑三种典型的损伤形态在一定激光通量范围内比较稳定，是激光驱动器运行可以容忍的良性损伤，分层剥落由于随激光脉冲作用其尺寸快速生长而形成灾难性损伤，这是系统运行所不能容忍的，但可以通过改进镀膜工艺抑制这种损伤形态的出现。 |
| 英文摘要 | Laser conditioning technology, as an effective method to improve laser damage resistance of optics, has been widely concerned and investigated. Aiming at establishing high power laser drivers, laser conditioning has become the key technical approach to improve the load capacity of some large-aperture optics, and it has stepped into practical engineering stage in American and some European countries. Constructing a small-beam raster-scan laser conditioning system and studying laser conditioning process have important values in solving domestic actual engineering problems. In this paper, laser conditioning is studied and the following aspects are included: Laser conditioning platform for large-aperture optics was constructed. This platform could realize fast, stable, and unattended full automation operation with integrating the functions including of outputting stable laser pulse, regulating energy precisely, monitoring beam characteristics real-timely, locating machine accurately, diagnosing damage real-timely, dealing test data timely, etc. Based on the fact that laser conditioning allows for benign damage to be present on the optics as long as the performance of the laser is not effected, typical laser-indeced damage morphologies of 1 } high reflectors(HRs) were investigated. Nodular-ejection pits, plasma scalds, and flat-bottom pits were stable at a certain fluence range and therefore were the allowable damages in laser divers. Delaminates, the size of which would grow quickly into catastrophe damage after subsequent shots, were not allowable, but can be eliminated from the optimization deposition process. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15842]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 刘晓凤. 小光斑扫描激光预处理系统集成控制与工艺优化[D]. 中国科学院上海光学精密机械研究所. 2011. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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