磷酸盐激光钕玻璃环形抛光工艺研究
文献类型：学位论文
| 作者 | 单海洋 |
| 学位类别 | 博士 |
| 答辩日期 | 2014 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 贺洪波 |
| 关键词 | 环形抛光，磷酸盐激光钕玻璃，抛光液，抛光胶，像散 |
| 其他题名 | Continuous Polishing Technics of Nd-doped Phosphate Laser Glass |
| 中文摘要 | 本论文研究了磷酸盐激光钕玻璃的环形抛光工艺，针对抛光液、抛光胶、抛光盘面形、抛光盘振动、减小钕玻璃椭圆像散等方面进行了研究。主要结果如下： 阐述了钕玻璃抛光过程中所使用的氧化铈抛光粉（液）的形貌、元素组成、颗粒大小和物相结构，发现抛光粉颗粒呈絮状、球状或不规则团聚形状，氧化铈抛光粉中除氧化铈外，还含有镧、氟、铝、硅及碳等其他元素成分，用激光粒度仪测得的抛光粉颗粒粒度为亚微米到几十微米范围，由XRD测得的抛光粉晶粒尺寸为几十纳米范围，氧化铈抛光粉属于立方晶系；发现抛光液中加入添加剂能够消除抛光过程中钕玻璃表面形成的抛光印迹；抛光液中存在的镧元素或氟元素影响钕玻璃抛光效率和表面质量，甚至在钕玻璃表面产生腐蚀坑。 利用正交试验，研究了抛光胶的摩擦性能，发现抛光胶胶号、抛光胶胶盘开槽方式、转动速度及加载压力影响着磷酸盐激光钕玻璃与抛光胶之间的平均摩擦系数大小和摩擦系数变化范围；结合开尔文模型和阿伦尼乌斯公式求出抛光胶的松弛时间，为抛光盘的面形演变提供理论依据；研究了掺杂对抛光胶的性能影响，发现掺杂石墨的改性抛光胶具有较高的弹性模量、优良的导热系数，掺杂5wt%SBS的抛光胶中具有最小的热膨胀系数。 总结了影响环形抛光抛光盘面形的因素。从抛光盘的蠕变变形、校正盘对抛光盘的磨削和加工环境温度变化三个方面模拟抛光盘面形的变化规律，发现温度变量对抛光盘形变影响尤为明显。提出了四种抛光盘面形检测方案，动态干涉仪法、导轨法、光电检测方法和图像跟踪分析法，其中图像跟踪分析法在设备搭建和结果分析两方面具有明显优势。 研究了抛光设备中抛光盘振动问题。从抛光盘与主轴之间存在倾角出发，推导振动方程，并进行模拟。当抛光盘和工件转速相差较大时，振动量随抛光时间呈现杂乱无章的变化；二者转速相差较小时，振动量随抛光时间增长出现大的周期性起伏。光学元件表面像散或中频误差与抛光盘的振动具有密切关系。 研究了减小钕玻璃椭圆像散理论的方法，理论发现可以利用抛光盘和工件转速比变化，实现矩形激光玻璃长边和短边方向非等量磨削，解决钕玻璃透过面形中椭圆像散问题。实验验证这种方法能够很好消除钕玻璃椭圆像散。 |
| 英文摘要 | This thesis studies the continuous polishing technics for the neodymium doped phosphate laser glass, including the polishing slurry, the polishing pitch, the evaluation figures of the polishing pad, the vibration of the polishing pad, and the decrease of the elliptical astigmatism for the laser glass. Main results are summarized as follows: The morphology, composition and crystalline phase of several kinds polishing powder (slurry) used in process were studied. It can be found that powder particles possess flocculent, nodular or irregular reunited shape. There are La, F, Al, Si or C elements in polishing powders except for CeO2. The particle size of the polishing powders is of the range micrometer by the laser particle analyzer, but of the range nanometer by the x-ray diffractometer. The CeO2 polishing powder possesses cubic phase structure. Some additives in the polishing slurry can eliminate the grid printed on the surface of the neodymium doped phosphate laser glass. The La or F elements in the polishing slurry can impact the polishing efficiency and the surface quality of the laser glass, even produce the erosion pit. The orthogonal experiments were designed to study the influence of the experimental parameters, such as the kind of polishing pitch, the groove mode, the velocity and the load, on the friction properties between phosphate laser glass and optical polishing pitch in the polishing process. Combined with the Kelvin model and Arrhenius formula, relaxation times of polishing pitches were calculated, which is a very important parameter for simulating the evaluation figures of the polishing pad. Doping effect on polishing performance of the adhesive was studied. The modified polishing pitch doping graphite possessed high elastic modulus, good thermal conductivity, and one mixed with 5 wt% SBS polishing compound was with the smallest thermal expansion coefficient. The figure of the polishing pad is simulated. The impacting factors are analyzed, including the polishing pad creep deformation, the calibration platen grinding and the ambient temperature change, in which the change of ambient temperature is most evident. Four methods for testing the figure of the polishing pad are proposed, including the dynamic interferometer method, the guide rail method, the photoelectric detection method and the image tracking analysis method. Among these four methods, the image tracking analysis has obvious advantages from two aspects of device structures and the results of analysis. A vibration equation was deduced based on the existence of inclination between the polishing plane and z-axis direction. Computational simulation of the vibration was conduct by introducing different parameters of the ultra-precision continuous polishing process. When the velocity of the pad is much different from that of the workpiece, the vibrations fluctuate desultorily. When the velocity of the pad is largely close to that of the workpiece, the vibrations present large periodical ups and downs peaks. The optics surface astigmatism or mid-spatial-frequency error are closely related to the vibration of the polishing pad. Declining the astigmatism for precision annular polishing was studied. Based on Preston equation grinding theory, non-uniform removal at different velocity rates between the pitch plane and Nd-glass can be used to decrease horizontal elliptical shape astigmatism. The improved process contributes to the production of high-efficiency Nd-glass. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15859]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 单海洋. 磷酸盐激光钕玻璃环形抛光工艺研究[D]. 中国科学院上海光学精密机械研究所. 2014. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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