电子束蒸发镀膜速率控制研究
文献类型：学位论文
| 作者 | 王善成 |
| 学位类别 | 硕士 |
| 答辩日期 | 2008 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 易葵 |
| 关键词 | 光学薄膜 电子束蒸发 沉积速率控制 PID |
| 其他题名 | Research of Rate Control in Electron-Beam Evaporated Optical Coatings |
| 中文摘要 | 蒸发速率是电子束蒸发制备光学薄膜的重要工艺参数之一。本文就基于计算机的电子束蒸发镀膜速率自动控制进行了研究。主要内容包括以下几个方面： 围绕电子束蒸发速率控制综合了速率控制的相关技术，比如蒸发速率石英晶振探测的原理﹑灯丝发射电流与灯丝温度的关系﹑膜料蒸发特性与蒸发温度的关系﹑电子束焦斑聚焦特性及速率闭环控制的原理。 详细描述了速率控制系统的硬件实现和软件编写。该硬件系统包括蒸发速率探测部分、电子枪灯丝电压调节部分、挡板控制部分以及一台程序控制的计算机。软件编写采用Labview开发平台，结合NI的数据采集卡PCI-6221实现上述PID闭环控制和各项输入输出控制。 详细描述了采用该速率控制系统进行现场实验的过程。选取SiO2和HfO2为速率控制的研究对象，对装载膜料为SiO2和HfO2的电子束蒸发镀膜系统分别进行阶跃响应。用作图法对阶跃响应曲线进行处理，通过Ziegler-Nichols工程经验公式进行原始参数整定，并在实验的基础上对控制器的原始参数进行调整以及对积分作用和微分作用进行分区处理：通过这些途径，速率控制获得了良好的表现。 |
| 英文摘要 | The evaporation rate is one of the most important technical parameters in coating deposition. The research of the rate control based on computer is done in this paper. The main content consists of the following aspects: The essential techniques of rate control are introduced, such as the principle of rate detection by quartz crystal﹑the relationship between filament emission current and filament temperature﹑the temperature dependence of material evaporation characteristic﹑the electron beam focalizing characteristic and the theory of rate closed-loop control. The hardware construction and the software implement of the rate control system are clearly described. The hardware system consists of deposition rate detection part﹑filament voltage adjustment part﹑shutter control part and a computer with control program. The software is developed with Labview combined with PCI-6221 to achieve the PID clsoed-loop control and I/O control. The experiments carried out by this control systemn are clearly described. Step response experiments are performed based on two kind of materials-SiO2 and HfO2 respectively, which are choose to be research objects in the rate control. Processing the step response results by drawing method, tuning the original control parameters by Ziegler-Nichols experimental formula and adjusting them based on the experiments, as well as subarea dealing of the integral and derivative control: the rate control achieves good performance by these ways. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16380]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 王善成. 电子束蒸发镀膜速率控制研究[D]. 中国科学院上海光学精密机械研究所. 2008. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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