渐变反射率镜的设计与制备
文献类型：学位论文
| 作者 | 吕国暖 |
| 学位类别 | 硕士 |
| 答辩日期 | 2008 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 易葵 |
| 关键词 | 渐变反射率镜 电子束蒸发 厚度变化层 掩模 |
| 其他题名 | Design and Fabrication of Graded Reflectivity Mirror |
| 中文摘要 | 本文围绕渐变反射率镜的设计、制备与测试分别从以下几方面开展了研究： 使用电子束蒸发技术制备了TiO2和Ta2O5混合膜料和Al2O3膜料的单层膜样品。测量了样品的透过光谱，利用透过率包络法计算了薄膜的折射率。 分析了（超）高斯镜的设计参数要求和膜系结构。研究了三明治型(超)高斯镜膜系的设计方法和厚度变化层厚度轮廓的计算。厚度轮廓和反射光的相位变化随着（超）高斯镜设计参数变化。还提出了全部膜层厚度渐变型（超）高斯镜的设计原理及设计过程。 发展了渐变反射率镜的制备方法。根据沉积薄膜的实际需求和具体的沉积设备，设计了掩模和掩模切换装置。该装置能方便安装在箱式电子枪蒸发镀膜机中，可以在一次高真空环境下镀制渐变反射率镜的所有膜层，节约时间，避免对样品的污染。建立通过掩模板制备厚度变化层的理论模型，介绍了掩模板的设计流程并举出了设计实例，还仔细分析了制备过程。 分析了渐变反射率镜的两种测量方法，即测量渐变反射率镜的径向厚度轮廓和对于工作波长的径向反射率或透射率轮廓。搭建了渐变反射率镜透射率测试平台，测出了实验样品的反射率轮廓。测试结果表明本文的设计方法与工艺流程能制备出符合要求的渐变反射率镜。 |
| 英文摘要 | In this thesis, focusing on some key problems, such as design, fabrication and test of graded reflectivity mirror, a systematic research in the following respects is carried out. Single-layer films of TiO2 & Ta2O5 and Al2O3 are fabricated through e-beam evaporation. The transmittance spectrums of the samples are tested, the refractive index is calculated with the transmissivity envelope method. The design parameter requirements and coating structures are analyzed. The design method of (super-) Gaussian mirror of the sandwich type and the calculation of the thickness profile of the thickness-variable layer are studied. The thickness profile and the phase variation in reflection vary with design parameters. The design theory and procedure of the fully shaped (super-) Gaussian mirror are proposed. The preparation method of graded reflectivity mirror is developed. The mask and the mask switchover equipments are designed considering the actual requirement of the thin films and the specific deposition facility. The equipment can be installed in the e-beam evaporation coating machine of cabinet-type, and all layers of the graded reflectivity mirror are deposited within one high vacuum environment, shortening the manufacturing time and reducing contamination.The theory model is proposed,which deposits thickness-variable layer with specific mask.The design procedure of mask and the design example are presented. Moreover,the preparation process is analyzed in detail. Two test methods are analyzed,one is how to measure the radial thickness profile and the other is how to measure the radial reflectance or transmittance profile.The optical platform used for the measurement of the reflectivity profiles is set up, and the reflectance profile is tested. The measuring results indicate that the graded reflectivity mirror prepared with this technique is basically in accordance with the design requirement. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16382]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 吕国暖. 渐变反射率镜的设计与制备[D]. 中国科学院上海光学精密机械研究所. 2008. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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