氧化铋薄膜的制备及蓝光存储性质的研究
文献类型：学位论文
| 作者 | 蒋志 |
| 学位类别 | 硕士 |
| 答辩日期 | 2008 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 耿永友 |
| 关键词 | 氧化铋薄膜 Fe掺杂氧化铋薄膜 磁控溅射 蓝光可录存储特性 |
| 其他题名 | Preparation of bismuth oxide films and their optical storage properties for blu-ray recordable disc |
| 中文摘要 | 论文首先对用于蓝光可录存储的无机材料进行回顾和总结，在分析各类记录材料优缺点的基础上，考虑到氧化物薄膜具有一些短波长记录优点，从而，提出我们的研究课题。 采用直流磁控溅射法在K9玻璃上制备了不同氧气与氩气分压比(20%, 50%, 70%)的氧化铋薄膜。对三种薄膜的组成和结构的研究表明，氧分压比为20%条件制备的薄膜主要由晶态的Bi2O2.75和Bi组成；氧分压比为50%的薄膜由非晶态的Bi2O3、晶态的Bi2O2.75和Bi组成。当氧分压比增加到70%后，薄膜被完全氧化成Bi2O3，沉积态薄膜是非晶结构。 对三种不同氧分压比条件制备的氧化铋薄膜的可录蓝光静态测试，得到如下结论：(1)三种薄膜都具有蓝光可录记录和读出特性，其中氧分压比为50%条件制备的薄膜具有较好的记录特性；(2)氧分压比为50%条件制备的薄膜记录后反射率增加；(3)氧分压比为50%条件制备的薄膜上得到了清晰的记录点，最小记录点直径约为450nm。在优化后的写入功率和脉宽条件下，其反射率对比度大于20%。 第三部分研究掺杂Fe对氧化铋薄膜的蓝光可录存储性能的影响。结果表明Fe的掺入降低了氧化铋薄膜对蓝光的灵敏度，提高了薄膜的记录稳定性；记录点直径从未掺杂时的450nm左右减小到掺杂后的200nm左右。对Fe掺杂后氧化铋薄膜的记录机理以及记录点减小的机理进行了分析。研究结果表明Fe掺杂氧化铋薄膜有潜力用于蓝光可录存储的记录介质。 |
| 英文摘要 | At first, the states of research and development trend of inorganic recording materials used for write-once blue laser recording were reviewed. Based on the analysis of the advantages and disadvantages of various materials and the consideration that the oxide films possess several advantages in short-wavelength optical recording, the research subject in my work was proposed. BiOx films with different O2/Ar ratios (20%, 50%, and 70%) were deposited on K9 glass substrates by reactive DC-magnetron sputtering. The XRD and XPS spectra of the as-deposited BiOx films sputtered at different O2/Ar ratios indicate that the BiOx films deposited at 20% O2/Ar ratio have two major components, crystalline Bi2O2.75 and crystalline Bi, whereas the BiOx films deposited at 50% O2/Ar ratio are composed of amorphous Bi2O3, crystalline Bi2O2.75 and crystalline Bi. And while the O2/Ar ratio is up to 70%, there are only amorphous Bi2O3 in the films. On the basis of the above results, BiOx films with different O2/Ar ratios were prepared for static optical test, and the results are as follows: (1) The BiOx films deposited at different O2/Ar ratios have recording and readout characteristics. But the best blue laser recording performance is obtained in the BiOx films deposited at 50% O2/Ar ratio. (2) The BiOx films deposited at 50% O2/Ar ratio, whose intensity of reflective light for the recording marks is increased. (3) Clear and circular recording marks are obtained on the BiOx films deposited at 50% O2/Ar ratio. The diameter of recording marks can reach 450nm or less. The reflectivity contrasts of the BiOx films are more than 20% at the optimized laser power and pulse width. In the third part, the static blue laser recording characteristics of Fe: BiOx films were discussed. It is observed that the introduction of Fe into BiOx films improves the stability of recording marks with decreasing the sensitivity for blue laser recording. Besides, the diameter of the recording marks has been reduced from 450nm to 200nm or less because of the introduction of Fe into BiOx films. The possible recording mechanism of Fe: BiOx films and the reasons for reducing the spot size are proposed. These results demonstrate that Fe: BiOx thin films have a potential to be applied in write-once disc. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16400]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 蒋志. 氧化铋薄膜的制备及蓝光存储性质的研究[D]. 中国科学院上海光学精密机械研究所. 2008. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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